期刊
OPTICS LETTERS
卷 47, 期 22, 页码 5773-5776出版社
Optica Publishing Group
DOI: 10.1364/OL.474923
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Phase measurement deflectometry (PMD) is a high-precision optical surface measurement method that achieves accuracy comparable to interference methods through a simple system structure. By replacing a large screen with two small screens and a single point, the proposed improvements in the traditional binocular PMD method increase system flexibility and measurement accuracy.
Phase measurement deflectometry (PMD) is an excellent method for high-precision optical surface measurement; through the simple system structure, accuracy comparable to that of interference methods can be realized. The key of PMD is to solve the ambiguity between the surface shape and normal vector. Considering all kinds of methods, the binocular PMD method is undoubtedly a method with a very simple system structure and can be easily applied to complex surfaces, such as free-form surfaces. However, this method relies on a large screen with high accuracy, which not only increases the weight of the system, but also reduces the flexibility of the system, and manufacturing errors in the large-size screen can easily become error sources. In this Letter, we have made some improvements based on the traditional binocular PMD. At first, we try to replace the large screen with two small screens to increase the flexibility and accuracy of the system. Further, we replace one small screen with a single point to simplify the system structure. Experiments show that the proposed methods not only improve the system flexibility and reduce the complexity, but can also achieve high measurement accuracy. (c) 2022 Optica Publishing Group
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