Rapid and wide-range pressure measurement at high-temperature using an intensity-compensation interrogation method

Rapid-interrogation of MEMS Fabry-Perot (F-P) sensor is a promising method for real-time pressure measurement in high-temperature environments, but this approach is rather challenging because of the temperature-induced influence on signals. To solve this problem, we first present (to our best knowledge) a novel intensity-compensation interrogation method for wide-range pressure monitoring from 25 degrees C to 700 degrees C. In the proposed method, Optical signal passing through the beam splitter is employed as a reference, which is applied to compensate the temperature-induced intensity fluctuations of the signals without affecting the orthogonality. Experimental results verifies that the proposed compensation technique reduces the intensity fluctuations of the two orthogonal signals by 95.1% and 95.7%, respectively, which significantly improves the stability of signals. Additionally, results also demonstrate that the proposed method achieves the real-time pressure measurement of 0.1 5 MPa at 25 degrees C and 0.1 3 MPa from 200 degrees C to 700 degrees C, with interrogation rate up to 5 kHz. The proposed intensity-compensation interrogation method overcomes the obstacle of wide-range pressure monitoring in high-temperature based on MEMS F-P sensor, and opens the way for real-time pressure measurement in harsh environments.

Automated summary

The study presents a novel intensity-compensation method for wide-range pressure monitoring in high-temperature environments. Experimental results demonstrate that the proposed method significantly improves signal stability and achieves real-time pressure measurement at different temperatures.