4.4 Article

The Tangerine project: Development of high-resolution 65 nm silicon MAPS

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ELSEVIER
DOI: 10.1016/j.nima.2022.167025

关键词

Silicon; CMOS; Monolithic active pixel sensors; MAPS; Particle detection; Test beam; Allpix(2); TCAD

资金

  1. Helmholtz Innovation Pool, Germany

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The Tangerine project aims to develop new state-of-the-art high-precision silicon detectors. Part of the project involves developing a monolithic active pixel sensor using a novel 65 nm CMOS imaging process. This process offers increased logic density, reduced power consumption, and material budget compared to other processes. The initial goal is to develop and test a sensor in a 65 nm CMOS imaging process that can be used in test beam telescopes, demonstrating its capabilities.
The Tangerine project aims to develop new state-of-the-art high-precision silicon detectors. Part of the project has the goal of developing a monolithic active pixel sensor using a novel 65 nm CMOS imaging process, with a small collection electrode. This is the first application of this process in particle physics, and it is of great interest as it allows for an increased logic density and reduced power consumption and material budget compared to other processes. The process is envisioned to be used in for example the next ALICE inner tracker upgrade, and in experiments at the electron-ion collider. The initial goal of the three-year Tangerine project is to develop and test a sensor in a 65 nm CMOS imaging process that can be used in test beam telescopes at DESY, providing excellent spatial resolution and high time resolution, and thus demonstrating the capabilities of the process. The project covers all aspects of sensor R&D, from electronics and sensor design using simulations, to prototype test chip characterisation in labs and at test beams. The sensor design simulations are performed by using a powerful combination of detailed electric field simulations using technology computer-aided design and high-statistics Monte Carlo simulations using the Allpix2 framework. A first prototype test chip in the process has been designed and produced, and successfully operated and tested both in labs and at test beams.

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