期刊
NANO LETTERS
卷 -, 期 -, 页码 -出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.2c01707
关键词
2D materials; MoS2; transistors; strain engineering; strain sensors; mobility
类别
资金
- National Science Foundation (NSF), NNCI [1542152]
- NSF EFRI 2-DARE grant [1542883]
- NDSEG Fellowship
- ARCS Fellowship
- Swiss National Science Foundation's Early Postdoc.Mobility fellowship [P2EZP2_181619]
- Beijing Institute of Collaborative Innovation (BICI)
- Swiss National Science Foundation (SNF) [P2EZP2_181619] Funding Source: Swiss National Science Foundation (SNF)
Strain can significantly enhance the electron mobility of two-dimensional semiconductors, which is crucial for applications such as flexible strain sensors.
Strain engineering is an important method for tuning the properties of semiconductors and has been used to improve the mobility of silicon transistors for several decades. Recently, theoretical studies have predicted that strain can also improve the mobility of two-dimensional (2D) semiconductors, e.g., by reducing intervalley scattering or lowering effective masses. Here, we experimentally show strain-enhanced electron mobility in monolayer MoS2 transistors with uniaxial tensile strain, on flexible substrates. The on-state current and mobility are nearly doubled with tensile strain up to 0.7%, and devices return to their initial state after release of the strain. We also show a gate-voltage-dependent gauge factor up to 200 for monolayer MoS2, which is higher than previous values reported for sub-1 nm thin piezoresistive films. These results demonstrate the importance of strain engineering 2D semiconductors for performance enhancements in integrated circuits, or for applications such as flexible strain sensors.
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