期刊
MICRON
卷 162, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.micron.2022.103346
关键词
Electron holography; Mean free path
类别
资金
- JSPS Kakenhi Grant [18KO4247]
In this work, the factors influencing mean free path values obtained from off-axis electron holography measurements are explored. The theoretical analysis shows that the mean amplitude reconstructed from off-axis holograms is only determined by the coherent portion of the direct beam, and this finding is confirmed by experimental studies. The measurements of different materials also demonstrate that the contributions of elastic and inelastic scattering to the total mean free path are in agreement with theoretical expectations. It is concluded that the mean amplitude signal and the associated mean free path values derived from off-axis holography reconstructions are not affected by experimental collection angles or enhanced sensitivity to low-loss phonon scattering.
In this work, we have explored the factors which govern mean free path values obtained from off-axis electron holography measurements. Firstly, we explore the topic from a theoretical perspective, and show that the mean amplitude reconstructed from off-axis holograms is due to the coherent portion of the direct, central objecttransmitted beam only - it is not affected by the presence or absence of other scattered beams. Secondly, we present a detailed experimental study which compares mean free path values obtained from hologram sideband, centreband, EELS, and TEM measurements as a function of optical collection angle and energy-loss-filtering. These results confirm that the coherent portion of the direct beam defines the mean amplitude, and additionally show that the coherent portion corresponds to the conventional energy-filtered signal (with threshold 5 eV in this work). Finally, we present summary measurements from a selection of different materials, and compare the results against a simple electron scattering model. This study reinforces the claim that the mean amplitude is defined by the energy-filtered direct beam, and confirms that the contributions of elastic and inelastic scattering to the total mean free path are broadly in line with theoretical expectations for these different materials. These results in aggregate indicate that neither experimental collection angles nor enhanced sensitivity to low-loss phonon scattering affect the mean amplitude signal arising from off-axis holography reconstructions, nor the associated mean free path values which are derived from this mean amplitude.
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