期刊
MICRON
卷 160, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.micron.2022.103304
关键词
Resolution; Image contrast; Point-spread function; TEM; STEM
类别
资金
- Natural Sciences and Engineering Research Council of Canada (NSERC) [DMR-2018683, CMMI-2016279]
- National Science Foundation
This article reviews the practical factors that determine the spatial resolution of TEM and STEM, and discusses the advantages of representing resolution in terms of a point-spread function. The article provides the point-spread functions for various resolution-limiting factors and compares beam broadening in different materials. Additionally, the importance of dose-limited resolution (DLR) for beam-sensitive specimens is emphasized, along with efforts to overcome the fundamental resolution limits.
We review the practical factors that determine the spatial resolution of transmission electron microscopy (TEM) and scanning-transmission electron microscopy (STEM), then enumerate the advantages of representing resolution in terms of a point-spread function. PSFs are given for the major resolution-limiting factors: aperture diffraction, spherical and chromatic aberration, beam divergence, beam broadening, Coulomb delocalization, radiolysis damage and secondary-electron generation from adatoms or atoms in a matrix. We note various definitions of beam broadening, complications of describing this effect in very thin specimens, and ways of optimizing the resolution in bright-field STEM of thick samples. Beam spreading in amorphous and crystalline materials is compared by means of simulations. For beam-sensitive specimens, we emphasize the importance of dose-limited resolution (DLR) and briefly recognize efforts to overcome the fundamental resolution limits set by the wave and particle properties of electrons.
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