Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal-Organic Framework Thin Films

We demonstrated the synthesis of a conductive two-dimensional metal-organic framework (MOF) thin film by single-step all-vapor-phase chemical vapor deposition (CVD). The synthesized large-area thin film of Cu-3(C6O6)(2) has an edge-on orientation with high crystallinity. Cu-3(C6O6)(2) thin film-based microdevices were fabricated by e-beam lithography and had an electrical conductivity of 92.95 S/cm. Synthesis of conductive MOF thin films by the all-vapor-phase CVD will enable fundamental studies of physical properties and may help to accomplish practical applications of conductive MOFs.

Automated summary

In this study, a conductive two-dimensional metal-organic framework (MOF) thin film was successfully synthesized using single-step all-vapor-phase chemical vapor deposition (CVD). The synthesized Cu-3(C6O6)(2) thin film showed high crystallinity with edge-on orientation. Cu-3(C6O6)(2) thin film-based microdevices were fabricated and exhibited an electrical conductivity of 92.95 S/cm. The synthesis of conductive MOF thin films by all-vapor-phase CVD offers a platform for fundamental studies on their physical properties and potential practical applications.