期刊
ADVANCED FUNCTIONAL MATERIALS
卷 25, 期 46, 页码 7208-7214出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adfm.201502008
关键词
-
类别
资金
- National Research Foundation of Korea (NRL program) [2014R1A2A1A01004815]
- National Research Foundation of Korea (Nano-Material Technology Development program) [2012M3A7B4034985]
- Brain Korea 21 plus Program
- National Research Foundation of Korea [2014R1A2A1A01004815, 21A20131100006] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
High-performance, air-stable, p-channel WSe2 top-gate field-effect transistors (FETs) using a bilayer gate dielectric composed of high-and low-k dielectrics are reported. Using only a high-k Al2O3 as the top-gate dielectric generally degrades the electrical properties of p-channel WSe2, therefore, a thin fluoropolymer (Cytop) as a buffer layer to protect the 2D channel from high-k oxide forming is deposited. As a result, a top-gate-patterned 2D WSe2 FET is realized. The top-gate p-channel WSe2 FET demonstrates a high hole mobility of 100 cm(2) V-1 s(-1) and a I-ON/I-OFF ratio > 10(7) at low gate voltages (V-GS ca. -4 V) and a drain voltage (V-DS) of -1 V on a glass substrate. Furthermore, the top-gate FET shows a very good stability in ambient air with a relative humidity of 45% for 7 days after device fabrication. Our approach of creating a high-k oxide/low-k organic bilayer dielectric is advantageous over single-layer high-k dielectrics for top-gate p-channel WSe2 FETs, which will lead the way toward future electronic nanodevices and their integration.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据