期刊
JOURNAL OF MICROSCOPY
卷 289, 期 1, 页码 20-31出版社
WILEY
DOI: 10.1111/jmi.13147
关键词
laser micromachining; microstructure diagnostics; nano-CT; sample preparation; X-ray microscopy
类别
This study presents novel workflows for sample preparation using ultra-short pulsed lasers, allowing for reproducible fabrication, safe extraction, and mounting of samples. These workflows are illustrated through nano-CT measurements of glass ceramics and laser-modified glass, while considering the requirements of other analytical techniques. The prepared samples can serve as a starting point for correlative microstructural analyses involving multiple techniques.
X-ray-computed tomography with sub-micron resolution (nano-CT) is one of the most useful techniques to examine the 3D microstructure of materials down to voxel sizes 10 nm. However, since size and shape of samples have considerable influence on acquisition time and data quality, adapted and universally applicable workflows are needed. Three novel workflows for sample preparation using ultra-short pulsed lasers are presented which allow for reproducible fabrication, safe extraction and mounting of samples. Their application potential is illustrated via nano-CT measurements of glass ceramics as well as a laser-modified glass. Since the according sample geometries take also the requirements of other analytical techniques such as transmission electron microscopy into account, samples prepared according to the new workflows can be furthermore seen as a starting point for correlative microstructural analyses involving multiple techniques.
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