期刊
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
卷 39, 期 -, 页码 188-193出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.jiec.2016.05.023
关键词
Conductive carbon patterns; Pitch; Proton beam lithography; Pyrolysis; Electric heating
资金
- National Research Foundation of Korea (NRF) - Korea government (MSIP) [2012M2A2A6013198, 2015M2A2A6A01043822, 2015R1D1A3A01016010]
- Chungnam National University
- National Research Foundation of Korea [2012M2A2A6013198, 2015R1D1A3A01016010, 2015M2A2A6A01043822] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Electrically-conductive carbon patterns (ECPs) from cheap pitch thin films were fabricated using a simple proton beam lithography and pyrolysis. Well-defined negative-type pitch patterns were formed at the optimized fluence of 3 x 10(15) ions cm(-2), and then pyrolyzed at various temperatures to create ECPs. The precursory pitch patterns formed at the optimized conditions were successfully temperature dependently converted to the ECPs by pyrolysis. The formed ECPs through pyrolysis at a higher temperature exhibited good electrical conductivity. Moreover, the ECPs exhibited good electric heating characteristics, demonstrating the possibility of using the ECPs as a cheap electric heating element. (C) 2016 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
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