期刊
IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷 27, 期 5, 页码 2612-2622出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2021.3112267
关键词
Acoustic transducers; Duffing oscillator; electrostatic actuators; equivalent-circuit model; microactuators
类别
资金
- Fraunhofer-Zukunftsstiftung
- State of Brandenburg
- European Union [80256335]
This article presents a circuit model that accurately captures the nonlinear behavior of an electrostatic transducer, validating its simulation results with experimental measurements. The model can be further extended to analyze additional complex behaviors.
This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据