4.8 Article

Integrated MEMS Toroidal Transformer With Ni-Zn Ferrite Core for Power Supply on Chip

期刊

IEEE TRANSACTIONS ON POWER ELECTRONICS
卷 37, 期 9, 页码 10075-10080

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPEL.2022.3160698

关键词

Transformer cores; Transformers; Ferrites; Power transformer insulation; Silicon; Circuit faults; Inductance; Microelectro-mechanical systems (MEMS); microintegrated transformer; Ni-Zn ferrite core; packaged power supply on chip (PwrSoC); through-silicon via (TSV)

资金

  1. Natural Science Foundation of Beijing Municipality [JQ20016]
  2. Advanced Aerospace Force Innovation Workstation [HKCX2020-02-015]
  3. Beijing Science andTechnology Planning Project [Z201100007720006]
  4. National Natural Fund of China [52006003]

向作者/读者索取更多资源

This study presents a through-silicon via high-aspect-ratio toroidal transformer manufactured using microelectro-mechanical systems and electroplating. By wrapping a 1.2 mm high toroidal Ni-Zn ferrite core in silicon, a compact transformer with excellent performance in a high frequency range is achieved.
A miniature integrable transformer is an obstacle to the miniaturization of packaged power supply on chip (PwrSoC). This letter introduces a through-silicon via (TSV) high-aspect-ratio toroidal transformer manufactured using microelectro-mechanical systems and electroplating. The primary coil and secondary coil of the transformer are interleaved on the toroidal core cavity, which is entirely wrapped in silicon, and a 1.2 mm high toroidal Ni-Zn ferrite core is formed. A 15:15 turn transformer is fabricated with a compact coil size of phi 4.1 x 2 mm with an aspect ratio (ratio of TSV depth to diameter) of 20. Measurements show that it has an inductance of 105 to 115 nH in a high frequency range of 1 to 80 MHz and a coupling coefficient of similar to 0.7 in the range of 1 MHz to >15 MHz. Compared to that of the transformer without the Ni-Zn ferrite core, the coupling coefficient of the toroidal transformer increases by 40% with an inductance increase of 20%. At a frequency of 14 MHz, the transformer has a maximum quality factor of 16.7. The small size, IC compatible manufacturing process and excellent performance at high-frequency of the transformer proposed, meet the further integrated and miniaturized needs of PwrSoC.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据