4.7 Article

A Parallel Optical Fiber Fabry-Perot Intalerometer for Simultaneous Measurement of Relative Humidity and Tumperature

期刊

IEEE SENSORS JOURNAL
卷 22, 期 18, 页码 17845-17853

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2022.3196373

关键词

Fabry-Perot interferometer (FPI); optical fiber sensor; polydimethylsiloxane (PDMS); polyimide (PI); relative humidity (RH) and temperature; Vernier effect

资金

  1. Middle-Aged and Youth Science and Technology Innovation Team Project of Hubei Province Universities, China [T2020014]
  2. Natural Science Foundation of Hubei Province, China [2020CFB468]
  3. Middle-Aged and Young Outstanding Innovation Team of Hubei Normal University, China [T201502]

向作者/读者索取更多资源

A parallel optical fiber Fabry-Perot interferometer and Vernier effect sensor for simultaneous high-sensitivity measurement of relative humidity and temperature is proposed and verified. By filling two Fabry-Perot cavities with different materials and connecting them in parallel, the sensor achieves simultaneous measurement of humidity and temperature through the Vernier effect.
A parallel optical fiber Fabry-Perot interferometer (FPI) and Vernier effect sensor for simultaneous high-sensitivity measurement of relative humidity (RH) and temperature is proposed and verified by experiments. Two sections of a single-mode fiber (SMF) are fixed on the precision displacement platform, aligning them and leaving a small gap between them, and then filling the gap with polydimethylsiloxane (PDMS) and polyimide (PI), respectively, to form two Fabry-Perot (F-P) cavities. To produce a Vernier effect when two F-P cavities are connected in parallel, the length of two F-P cavities must be accurately controlled to ensure that the free spectral range (FSR) of the two F-P cavities is similar. It is found that the F-P cavity filled with PI is sensitive to RH and temperature, while the F-P cavity filled with PDMS is only sensitive to temperature. Due to the different characteristics of the two F-P cavities, the simultaneous measurement of RH and temperature is realized by constructing the sensitivity measurement matrix. If they are connected in parallel to produce the Vernier effect, the RH and temperature sensitivities of the parallel structure can reach -11.388 nm/%RH and 18.436 nm/degrees C, respectively. The sensor has potential applications in the fields of biopharmaceuticals, environmental monitoring, food processing, and microbial sensing.

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