4.6 Article

Physics-Based Compact Model of Current Stress-Induced Threshold Voltage Shift in Top-Gate Self-Aligned Amorphous InGaZnO Thin-Film Transistors

期刊

IEEE ELECTRON DEVICE LETTERS
卷 43, 期 10, 页码 1685-1688

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3202992

关键词

InGaZnO thin-film transistors; self-aligned top-gate structure; current stress; electron trapping; donor creation

资金

  1. LG Display Company
  2. National Research Foundation of Korea (NRF) - Korean Government [Ministry of Science and ICT (MSIT)] [2016R1A5A1012966, 2020R1A2B5B01001979]
  3. Basic Study and Interdisciplinary Research and Development Foundation Fund of the University of Seoul

向作者/读者索取更多资源

In this study, the threshold voltage shift in self-aligned top-gate amorphous InGaZnO thin-film transistors under various current stress conditions was quantitatively studied. A stretched-exponential function-based model was proposed, which showed that the electron trapping time constant was inversely proportional to the difference between the gate-source voltage and the threshold voltage, and the time constant was directly proportional to the square root of the sum of the drain-source voltage and the built-in voltage, potentially due to the lateral electric field-induced local donor creation near the drain. The proposed model was experimentally verified and it was confirmed that the lateral electric field dominantly influenced donor creation near the drain.
Threshold voltage shift (Delta V-T) under various current stress (CS) conditions need to be quantitatively studied in self-aligned top-gate amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Here, we propose a stretched-exponential function (SEF)-based Delta V-T model that can be applied to various combinations of V-GS and V-Ds. The proposed model indicates the characteristic electron trapping time constant ri is inversely proportional to (V-GS - V-T). In contrast, the time constant tau(2) is directly proportional to the square root of (V-Ds +V-bi), presumably due to the local donor creation by a lateral electric field. The proposed model was verified experimentally in various V-GS and V-Ds configurations. Further, it is confirmed that the lateral electric field dominantly influences donor creation near the drain.

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