4.7 Article

Phase change in GeTe/Sb2Te3 superlattices: Formation of the vacancy-ordered metastable cubic structure via Ge migration

期刊

APPLIED SURFACE SCIENCE
卷 602, 期 -, 页码 -

出版社

ELSEVIER
DOI: 10.1016/j.apsusc.2022.154274

关键词

Superlattice; GeTe/Sb2Te3 thin film; Epitaxial thin films; Metavalent bonding; Metal-to-insulator transition; Interfacial phase-change materials; Reversible bond-switching; Phase-change mechanism; Vacancy layer; DFT calculation

资金

  1. Nano Material Technology Development Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT, and Future Planning [NRF2016M3A7B4910398]
  2. Ministry of Trade, Industry & Energy (MOTIE) in Korea [10080625]
  3. Government of Korea (MSIP) [2021M3H4A1A03052566]
  4. Korea Semiconductor Research Consortium (KSRC)
  5. National Research Foundation of Korea (NRF) - Korea government (MSIP) [2020M3F3A2A0108232413]
  6. Korea Evaluation Institute of Industrial Technology (KEIT) [10080625] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
  7. National Research Foundation of Korea [2021M3H4A1A03052566] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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This study investigates the phase-change characteristics of interfacial phase-change memory (iPCM) using atomic scale imaging, X-ray diffraction, and chemical analysis with first-principles density functional theory (DFT) calculations. The results reveal that the low-resistance state of iPCM can convert reversibly into a modified metastable face-centered cubic (fcc) GeSbTe structure in the high-resistance state. This transition is driven by rearrangement of Ge atoms and formation of ordered vacancy layers. The study provides insights into the phase-change mechanisms of iPCM and the design of phase-change random access memory with low energy and high speed.
Interfacial phase-change memory (iPCM), comprising alternating layers of two chalcogenide-based phase-change materials-Sb2Te3 (ST) and GeTe (GT)-has demonstrated outstanding performance in resistive memories. However, its comprehensive understanding is controversial. Herein, the phase-change characteristic of iPCM is identified using atomic scale imaging, X-ray diffraction, and chemical analysis with first-principles density functional theory (DFT) calculations. By inducing laser pulsing, the ST/GT superlattice structure in the low-resistance state tends to reversibly convert into the modified metastable face-centered cubic (fcc) GeSbTe structure in the high-resistance state. This transition is driven by Ge atom rearrangement to pre-existing vacancy layers and ordered vacancy-layer formation. DFT atomistic modeling shows that the resistance difference of 10(2) orders between low- and high-resistance states is a direct consequence of the intercalation of Ge atoms into the vacancy layer. These results provide insights into iPCM phase-change mechanisms and phase-change random access memory design with low energy and high speed.

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