4.8 Review

Micro-thermoelectric devices

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Summary: Researchers have developed a fully screen printed flexible origami TEG using printable thermoelectric polymers and composite materials, which can harvest energy from low-temperature environmental heat. They achieved high power output and thermal impedance matching, demonstrating a wireless energy-harvesting application.

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Development of a Thermoelectric Energy Generator With Double Cavity by Standard CMOS Process

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Design Guidelines for Micro-Thermoelectric Devices by Finite Element Analysis

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3D Printing of highly textured bulk thermoelectric materials: mechanically robust BiSbTe alloys with superior performance

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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2018)

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Design and fabrication of low resistance palm-power generator based on flexible thermoelectric composite film

Xiaodong Wang et al.

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High-Performance PbTe Thermoelectric Films by Scalable and Low-Cost Printing

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Modeling, Simulation, Fabrication, and Characterization of a 10-μW/cm2 Class Si-Nanowire Thermoelectric Generator for IoT Applications

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Qi Hao Zhang et al.

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Fabrication Process for Micro Thermoelectric Generators (μTEGs)

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Superlattice-based thin-film thermoelectric modules with high cooling fluxes

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The Universal Influence of Contact Resistance on the Efficiency of a Thermoelectric Generator

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A planar micro thermoelectric generator with high thermal resistance

Zheng Yuan et al.

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A wearable thermoelectric generator fabricated on a glass fabric

Sun Jin Kim et al.

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Design and Characterization of Micro Thermoelectric Cross-Plane Generators With Electroplated Bi2Te3, SbxTey, and Reflow Soldering

Reinhard Roth et al.

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Saniya LeBlanc et al.

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Fabrication of Flexible Thermoelectric Thin Film Devices by Inkjet Printing

Ziyang Lu et al.

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Angelina Besganz et al.

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Controlled improvement in specific contact resistivity for thermoelectric materials by ion implantation

Patrick J. Taylor et al.

APPLIED PHYSICS LETTERS (2013)

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$ per W metrics for thermoelectric power generation: beyond ZT

Shannon K. Yee et al.

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Post-CMOS FinFET Integration of Bismuth Telluride and Antimony Telluride Thin-Film-Based Thermoelectric Devices on SoI Substrate

Ethem Erkan Aktakka et al.

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A high-output-voltage micro-thermoelectric generator having high-aspect-ratio structure

N. Kouma et al.

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Optimized thermal coupling of micro thermoelectric generators for improved output performance

N. Wojtas et al.

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Improved Vertical Silicon Nanowire Based Thermoelectric Power Generator With Polyimide Filling

Yida Li et al.

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Avram Bar-Cohen et al.

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CMOS MEMS-based thermoelectric generator with an efficient heat dissipation path

Xiao Yu et al.

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High-performance bulk thermoelectrics with all-scale hierarchical architectures

Kanishka Biswas et al.

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Thermoelectric Thin Film Device of Cross-Plane Configuration Processed by Electrodeposition and Flip-Chip Bonding

Min-Young Kim et al.

MATERIALS TRANSACTIONS (2012)

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Diffusion at interfaces of micro thermoelectric devices

Nam-Ho Bae et al.

CURRENT APPLIED PHYSICS (2011)

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Multistage Planar Thermoelectric Microcoolers

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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2011)

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Dispenser-printed planar thick-film thermoelectric energy generators

A. Chen et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2011)

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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)

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A batch process micromachined thermoelectric energy harvester: fabrication and characterization

J. Su et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)

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Low Resistance Ohmic Contacts to Bi2Te3 Using Ni and Co Metallization

Rahul P. Gupta et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2010)

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Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

Pin-Hsu Kao et al.

SENSORS (2010)

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Bi2Te3-Based Flexible Micro Thermoelectric Generator With Optimized Design

Wulf Glatz et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2009)

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Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators

Jin Xie et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)

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On-chip cooling by superlattice-based thin-film thermoelectrics

Ihtesham Chowdhury et al.

NATURE NANOTECHNOLOGY (2009)

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Development of a thermoelectric energy harvester with thermal isolation cavity by standard CMOS process

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Enhanced thermoelectric performance of rough silicon nanowires

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NATURE (2008)

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Silicon nanowires as efficient thermoelectric materials

Akram I. Boukai et al.

NATURE (2008)

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Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

Till Huesgen et al.

SENSORS AND ACTUATORS A-PHYSICAL (2008)

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Optimization and fabrication of thick flexible polymer based micro thermoelectric generator

Wulf Glatz et al.

SENSORS AND ACTUATORS A-PHYSICAL (2006)

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Coin-size coiled-up polymer foil thermoelectric power generator for wearable electronics

J. Weber et al.

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On-chip solid-state cooling for integrated circuits using thin-film microrefrigerators

A Shakouri et al.

IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES (2005)

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Micromachined CMOS thermoelectric generators as on-chip power supply

M Strasser et al.

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New thermoelectric components using microsystem technologies

H Böttner et al.

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Thermoelectric microdevice fabricated by a MEMS-like electrochemical process

GJ Snyder et al.

NATURE MATERIALS (2003)

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Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining

M Strasser et al.

SENSORS AND ACTUATORS A-PHYSICAL (2002)