期刊
ADVANCED MATERIALS TECHNOLOGIES
卷 7, 期 11, 页码 -出版社
WILEY
DOI: 10.1002/admt.202200190
关键词
giant magnetoresistance; large area deposition; magnetic ink; printed magnetoelectronics; roll-to-roll processing
资金
- Leibniz Association [J21/2017, T62/2019]
- German Research Foundation DFG [SCHM 1298/22-1, KA5051/1-1, KA5051/3-1]
- Projekt DEAL
The application of printed magnetoelectronics has been hindered by the lack of large area exchange coupled metallic multilayers. However, the development of a precise and high performance R2R sputtering technology has allowed for the fabrication of large area giant magnetoresistive thin-film stacks. This technology enables the printing of high performance magnetic sensors in a cost-efficient way, promoting integration with printed electronics.
Till now application of printed magnetoelectronics is hindered by lack of large area exchange coupled metallic multilayers required to produce printable magneto-sensory inks. Large-scale roll-to-roll (R2R) fabrication process is an attractive approach owing to its capabilities for high volume, high throughput, and large area manufacturing. Precise and high performance R2R sputtering technology is developed to fabricate large area giant magnetoresistive (GMR) thin-films stacks that contain 30 metallic bilayers prepared by continuous R2R sputtering of Co and Cu sequential on a hundred meters long polyethylene terephthalate (PET) web. The R2R sputtered Co/Cu multilayer on a 0.2 x 100 m(2) PET web exhibits a GMR ratio of approximate to 40% achieving the largest area exchange coupled room temperature magneto-sensitive system demonstrated to date. The prepared GMR thin-film is converted to magnetosensitive ink that enables printing of magnetic sensors with high performance in a cost-efficient way, which promotes integration with printed electronics. An average GMR ratio of approximate to 18% is obtained for 370 printed magnetic sensors. The realized precise R2R sputtering approach can also be extended to a wide range of hybrid thin-film material systems opening up a path for new functional inks applied with printing technologies.
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