期刊
COATINGS
卷 12, 期 6, 页码 -出版社
MDPI
DOI: 10.3390/coatings12060777
关键词
silicon carbide; Junction Barrier Schottky; diode; wafer thinning; laser annealing
资金
- Technology Innovation Program [20003935]
- Ministry of Trade, Industry, & Energy (MOTIE, Korea)
In this study, the characteristics of an n-type Ni/SiC ohmic contact on thin SiC wafers were investigated using laser annealing process. The electrical behavior of ohmic contacts was tested in 4H-SiC JBS diode devices. The results showed that a decrease in on-resistance was achieved by using the laser annealing process with Ni silicide.
In this study, we investigated the characteristics of the n-type Ni/SiC ohmic contact using the laser annealing process on thin wafers. The electrical behavior of the ohmic contacts was tested in 4H-SiC JBS diode devices. As a result, a wafer thickness of 100 mu m in the 4H-SiC JBS diode achieved a forward voltage of 1.33 V at 20 A with a laser annealing process using Ni silicide. Using a laser annealing process on a wafer thickness of 100 mu m, an on-resistance decrease of almost 22% was demonstrated. Based on our experimental results, we suggest an alternative laser annealing fabrication scheme to obtain low on-resistance SiC power devices with thin structures after SiC grinding.
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