4.7 Article

Ultrafast miniaturized GaN-based optoelectronic proximity sensor

期刊

PHOTONICS RESEARCH
卷 10, 期 8, 页码 1964-1970

出版社

CHINESE LASER PRESS
DOI: 10.1364/PRJ.462933

关键词

-

类别

资金

  1. NSQKJJ [K20799112]
  2. HKSAR Research Grants Council (RGC) Early Career Scheme [27202919]
  3. Shenzhen Natural Science Foundation Stability Support Program Project [20200925160044004]
  4. National Natural Science Foundation of China [12074170, 62004088]

向作者/读者索取更多资源

This work presents a novel ultrafast optoelectronic proximity sensor based on a submillimeter-sized GaN monolithic chip. The on-chip units function as emitters and receivers, exhibiting high sensitivity and repeatability to object movement, as well as ultrafast response and real-time monitoring capability. The compact integration scheme presented in this study opens a new avenue for chip-scale proximity sensing devices.
In this work, a novel ultrafast optoelectronic proximity sensor based on a submillimeter-sized GaN monolithic chip is presented. Fabricated through wafer-scale microfabrication processes, the on-chip units adopting identical InGaN/GaN diode structures can function as emitters and receivers. The optoelectronic properties of the on-chip units are thoroughly investigated, and the ability of the receivers to respond to changes in light intensity from the emitter is verified, revealing that the sensor is suitable for operation in reflection mode. Through a series of dynamic measurements, the sensor is highly sensitive to object movement at subcentimeter distances with high repeatability. The sensor exhibits ultrafast microsecond response, and its real-time monitoring capability is also demonstrated by applying it to detect slight motions of moving objects at different frequencies, including the human heart rate, the vibration of the rotary pump, the oscillation of the speaker diaphragm, and the speed of the rotating disk. The compact and elegant integration scheme presented herein opens a new avenue for realizing a chip-scale proximity sensing device, making it a promising candidate for widespread practical applications. (C) 2022 Chinese Laser Press

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据