期刊
NANOMATERIALS
卷 12, 期 15, 页码 -出版社
MDPI
DOI: 10.3390/nano12152722
关键词
multi-component alloy; nitride thin film; nanocrystalline; in situ compressive test
类别
资金
- National Natural Science Foundation of China [52173226, 52130108]
- Guangdong Basic and Applied Basic Research Foundation [2021A1515012278]
- City University of Hong Kong SIRG grant [7020008]
This study investigates the mechanical properties of multi-component nitride thin films and their relationship with the microstructure. The results demonstrate that the synergistic effects of nanocrystalline structure, covalent bonding between N and metal atoms, and interstitial strengthening contribute to the superior mechanical properties of the thin films.
Multi-component nitride thin films usually show high hardness and good wear resistance due to the nanoscale structure and solid-solution strengthening effect. However, the state of N atoms in the thin film and its effects on the compressive strength is still unclear. In this work, (AlTiVCr)N multi-component nitride thin films with a face-centered cubic (FCC) structure prepared by the direct current magnetron sputtering method exhibit a superior strength of similar to 4.5 GPa and final fracture at a strain of similar to 5.0%. The excellent mechanical properties are attributed to the synergistic effects of the nanocrystalline structure, covalent bonding between N and metal atoms, and interstitial strengthening. Our results could provide an intensive understanding of the relationship between microstructure and mechanical performances for multi-component nitride thin films, which may promote their applications in micro- and nano-devices.
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