期刊
LIGHT-SCIENCE & APPLICATIONS
卷 11, 期 1, 页码 -出版社
SPRINGERNATURE
DOI: 10.1038/s41377-022-00883-9
关键词
-
类别
资金
- National Key Research and Development Program of China [2017YFA0205700]
- National Natural Science Foundation of China [61927820, 12004314, 62105269]
- Zhejiang Province Selected Funding for Postdoctoral Research Projects [ZJ2021044]
- China Postdoctoral Science Foundation [2021M702916]
- open project program of Wuhan National Laboratory for optoelectronics [2020WNLOKF004]
- Zhejiang Provincial Natural Science Foundation of China [Q21A040010]
This study demonstrates an efficient femtosecond laser scanning technique for manufacturing highly regular nanogratings on semiconductor-on-metal thin films. The technique enables high-speed manufacturing with tunable periodicity. The interference effects of the semiconductor-on-metal film also contribute to high energy efficiency during laser nano-processing. The fabricated nanogratings have various applications in refractive index sensing, structural colors, and superhydrophilicity.
It is always a great challenge to bridge the nano- and macro-worlds in nanoscience, for instance, manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days. Here, we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale, highly regular nanogratings on semiconductor-on-metal thin films. Our technique takes advantage of long-range surface plasmons-laser interference, which is regulated by a self-initiated seed. By controlling the scanning speed, two types of nanogratings are readily manufactured, which are produced by either oxidation or ablation. We achieve a record manufacturing speed (>1 cm(2) s(-1)), with tunable periodicity of ? < 1 mu m. The fractional variation of their periodicity is evaluated to be as low as increment ?/? approximate to 0.5%. Furthermore, by utilizing the semiconductor-on-metal film-endowed interference effects, an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing. As the fabricated nanogratings exhibit multi-functionality, we exemplify their practical applications in highly sensitive refractive index sensing, vivid structural colors, and durable superhydrophilicity.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据