期刊
JOURNAL OF ELECTRONIC MATERIALS
卷 46, 期 5, 页码 2844-2846出版社
SPRINGER
DOI: 10.1007/s11664-016-4992-5
关键词
Thermoelectric; thin film; semiconductors; microfabrication
Thermoelectric energy harvesters convert otherwise wasted heat into electrical energy. As a result, they have the potential to play a critical role in the autonomous wireless sensor network signal chain. In this paper, we present work carried out on the development of Bi2Te3-based thermoelectric chip-scale energy harvesting devices. Process flow, device demonstration and characterization are highlighted.
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