4.6 Article

Highly Robust Ti Adhesion Layer during Terminal Reaction in Micro-Bumps

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A new spalling mechanism of intermetallics from the adhesion layer in the terminal-stage reaction between Cu and Sn

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Summary: This study investigates the spalling phenomenon that occurs when the wetting layer of under bump metallurgy is depleted in ultrathin Cu-Sn microbumps. It was found that spalling of Cu6Sn5 and Cu3Sn from the adhesion layer occurs when Cu is depleted, due to the high interfacial energy between intermetallics and the adhesion layer. To prevent this spalling and maintain bump integrity, the Cu wetting layer must be at least 1.3 times thicker than that of Sn.

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