期刊
MATERIALS
卷 15, 期 15, 页码 -出版社
MDPI
DOI: 10.3390/ma15155243
关键词
transition metal oxide; vanadium oxide; passivation; heterojunction solar cell
类别
资金
- National Research Foundation of Korea (NRF) - Korean government (Ministry of Science and ICT) [2020R1F1A1053556]
- National Research Foundation of Korea [2020R1F1A1053556] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
This study reports on an improved method for enhancing surface passivation of silicon by adjusting the substrate temperature during the deposition of V2O5-x. The results show that the deposition temperature of V2O5-x has a decisive effect on the surface passivation performance, and the aspect ratio of V2O5-x islands plays a crucial role in facilitating the transport of oxygen atoms.
In recent decades, dopant-free Si-based solar cells with a transition metal oxide layer have gained noticeable research interest as promising candidates for next-generation solar cells with both low manufacturing cost and high power conversion efficiency. Here, we report the effect of the substrate temperature for the deposition of vanadium oxide (V2O5-x, 0 <= X <= 5) thin films (TFs) for enhanced Si surface passivation. The effectiveness of SiOx formation at the Si/V2O5-x interface for Si surface passivation was investigated by comparing the results of minority carrier lifetime measurements, X-ray photoelectron spectroscopy, and atomic force microscopy. We successfully demonstrated that the deposition temperature of V2O5-x has a decisive effect on the surface passivation performance. The results confirmed that the aspect ratio of the V2O5-x islands that are initially deposited is a crucial factor to facilitate the transport of oxygen atoms originating from the V2O5-x being deposited to the Si surface. In addition, the stoichiometry of V2O5-x TFs can be notably altered by substrate temperature during deposition. As a result, experimentation with the fabricated Si/V2O5-x heterojunction solar cells confirmed that the power conversion efficiency is the highest at a V2O5-x deposition temperature of 75 degrees C.
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