4.6 Article

Influence of process parameters on energetic properties of sputter-deposited Al/CuO reactive multilayers

期刊

NANOTECHNOLOGY
卷 33, 期 46, 页码 -

出版社

IOP Publishing Ltd
DOI: 10.1088/1361-6528/ac85c5

关键词

nanothermite; magnetron sputtering; thin film; Al; CuO nanolaminates; pyroMEMS; nanoenergetics

资金

  1. European Research Council (ERC) (H2020 Excellent Science) Researcher Award [832889-PyroSafe]
  2. LAAS-CNRS technology platform, a member of the Renatech network

向作者/读者索取更多资源

In this study, the effect of sputtering power and deposition pressure on the ignition and combustion properties of Al/CuO reactive thin films was investigated. Changing the process parameters resulted in a high-quality thin film with a 200% increase in the burn rate and a 50% decrease in the ignition energy. Atomically resolved structural and chemical analyzes revealed the influence of microstructural differences at the interface on the migration of Al and O and the overall nano-thermite reactivity. The magnitude of residual stress induced during deposition was found to play a decisive role in the reactivity of the nanolaminates.
In this study, we demonstrate the effect of change of the sputtering power and the deposition pressure on the ignition and the combustion properties of Al/CuO reactive thin films. A reduced sputtering power of Al along with the deposition carried out at a higher-pressure result in a high-quality thin film showing a 200% improvement in the burn rate and a 50% drop in the ignition energy. This highlights the direct implication of the change of the process parameters on the responsivity and the reactivity of the reactive film while maintaining the Al and CuO thin-film integrity both crystallographically and chemically. Atomically resolved structural and chemical analyzes enabled us to qualitatively determine how the microstructural differences at the interface (thickness, stress level, delamination at high temperatures and intermixing) facilitate the Al and O migrations and impact the overall nano-thermite reactivity. We found that the deposition of CuO under low pressure produces well-defined and similar Al-CuO and CuO-Al interfaces with the least expected intermixing. Our investigations also showed that the magnitude of residual stress induced during the deposition plays a decisive role in influencing the overall nano-thermite reactivity. Higher is the magnitude of the tensile residual stress induced, stronger is the presence of gaseous oxygen at the interface. By contrast, high compressive interfacial stress aids in preserving the Al atoms for the main reaction while not getting expended in the interface thickening. Overall, this analysis helped in understanding the effect of change of deposition conditions on the reactivity of Al/CuO nanolaminates and several handles that may be pulled to optimize the process better by means of physical engineering of the interfaces.

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