4.6 Article

Surface nanopatterning of amorphous gallium oxide thin film for enhanced solar-blind photodetection

期刊

NANOTECHNOLOGY
卷 33, 期 37, 页码 -

出版社

IOP Publishing Ltd
DOI: 10.1088/1361-6528/ac76d3

关键词

amorphous gallium oxide; surface modification; solar-blind photodetectors; nanopatterning; ion beam sputtering

资金

  1. Indian Institute of Technology Ropar and Defence Research and Development Organisation [ERIP/ER/201612009/M/01/1714]

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This study reports a simple and cost-effective method to enhance the device performance of amorphous gallium oxide thin film photodetectors by nanopatterning the surface. The formation of ripples on the surface leads to the creation of anisotropic conduction channels and an increase in surface defects, resulting in a reduction in device decay time and an improvement in device speed.
Gallium oxide is an ultra-wide band gap semiconductor (E (g) > 4.4 eV), best suited intrinsically for the fabrication of solar-blind photodetectors. Apart from its crystalline phases, amorphous Ga2O3 based solar-blind photodetector offer simple and facile growth without the hassle of lattice matching and high temperatures for growth and annealing. However, they often suffer from long response times which hinders any practical use. Herein, we report a simple and cost-effective method to enhance the device performance of amorphous gallium oxide thin film photodetector by nanopatterning the surface using a broad and low energy Ar+ ion beam. The ripples formed on the surface of gallium oxide thin film lead to the formation of anisotropic conduction channels along with an increase in the surface defects. The defects introduced in the system act as recombination centers for the charge carriers bringing about a reduction in the decay time of the devices, even at zero-bias. The fall time of the rippled devices, therefore, reduces, making the devices faster by more than 15 times. This approach of surface modification of gallium oxide provides a one-step, low cost method to enhance the device performance of amorphous thin films which can help in the realization of next-generation optoelectronics.

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