期刊
NANO LETTERS
卷 22, 期 14, 页码 5667-5673出版社
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c05012
关键词
single-photon detector; nanowires; SNSPD; superconducting devices; mid-infrared
类别
资金
- Army Research Office (ARO) [W911NF-21-2-0041]
- Defense Advanced Research Projects Agency (DARPA) Defense Sciences Office (DSO) Invisible Headlights
- National Aeronautics and Space Administration (NASA) ROSES-APRA programs
- NASA Postdoctoral Program at the Jet Propulsion Laboratory
- Shannon Award
- NASA
The optimization of superconducting materials and the improvement of nanofabrication process have enabled the demonstration of large-area superconducting nanowire single-photon detectors (SNSPDs) with unity internal detection efficiency (IDE) in the mid-infrared (mid-IR) band. The approach yields large-area meanders with minimal line-width roughness and reduced impact from constrictions, paving the way for high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.
The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nano-wires can achieve unity internal detection efficiency (IDE) up to lambda = 10 mu m. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 mu m. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.
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