期刊
MEASUREMENT
卷 200, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.measurement.2022.111634
关键词
MEMS; Capacitive sensor; Area-variant; Bionic; Nano-indentation
资金
- National Natural Science Foundation of China [52105589]
- China Post- doctoral Science Foundation [2021M692590]
- Fundamental Research Funds for the Central Universities, China [xzy012021009]
- Beijing Advanced Innovation Center for Intelligent Robots [2019IRS08]
- State Key Laboratory of Robotics and Systems (HIT) [SKLRS2021KF17]
- Chongqing Natural Science Basic Research Project [cstc2021jcyj-msxmX0801]
In this paper, a high sensitive area-variant type MEMS capacitive sensor was proposed for nano-indentation measurement. The sensor exhibited high mechanical sensitivity, compact chip size, and the ability to eliminate electrostatic interference, making it suitable for nano-indentation measurement at the sub-nano-Newton level.
In this paper, a high sensitive area-variant type MEMS capacitive sensor was proposed for nano-indentation measurement. The proposed bionic swallow structure processed a high mechanical sensitivity without in-fluences from the load coupling effect. Six comb arrays were optimized and integrated into the proposed sensor with a novel comb sensing configuration for eliminating electrostatic interferences resulting from multiple combs and maintaining compact chip size. Based on the proposed micro-machined process, comb arrays have been fabricated with great consistency, which exhibited a static differential output of 0.0554 pF. The fabricated sensor has been characterized with rigid glass cube and AFM cantilevers, and the measured force sensitivity can reach 98.54 aF/nN for a larger measurement range of 142 mu N with a linearity of 0.9996. The fabricated sensor also exhibited a high resolution of 0.9819 nN, indicating its great feasibility in nano-indentation measurement at the sub-nano-Newton level.
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