☆ 4.6 Article

Single-beam ion source enhanced growth of transparent conductive thin films

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2022)

Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges

Bocong Zheng et al.

Summary: The study compared one-dimensional and two-dimensional particle-in-cell/Monte Carlo collision simulations for balanced direct current magnetron sputtering discharge. It found that both simulations yielded similar plasma parameters and replicated the high-energy tail of electron energy distribution in DCMS discharges. The research confirmed the accuracy and efficiency of using one-dimensional simulations to investigate the characteristics of balanced DCMS discharge.

PHYSICS OF PLASMAS (2021)

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Article Physics, Fluids & Plasmas

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

Bocong Zheng et al.

Summary: An analysis of electron dynamics in RFMS argon discharge reveals that Ohmic power absorption is the dominant mechanism, while the contribution of secondary electrons to power absorption can be neglected under typical RFMS discharge conditions.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2021)

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Article Materials Science, Multidisciplinary

Microstructure evolution of room-temperature-sputtered ITO films suitable for silicon heterojunction solar cells

M. L. Addonizio et al.

CURRENT APPLIED PHYSICS (2020)

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Article Physics, Fluids & Plasmas

Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges

Bocong Zheng et al.

PLASMA SOURCES SCIENCE & TECHNOLOGY (2019)

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Article Materials Science, Multidisciplinary

Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties

P. Pisarik et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2018)

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Article Chemistry, Physical

Growth dynamics controllable deposition of homoepitaxial MgO films on the IBAD-MgO substrates

Wei Wang et al.

APPLIED SURFACE SCIENCE (2018)

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Single-beam ion source enhanced growth of transparent conductive thin films

相关参考文献

Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

Microstructure evolution of room-temperature-sputtered ITO films suitable for silicon heterojunction solar cells

Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges

Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties

Growth dynamics controllable deposition of homoepitaxial MgO films on the IBAD-MgO substrates

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