期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 55, 期 36, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6463/ac77c9
关键词
beta-Ga2O3 microbelt; solar-blind photodetector; high quality; high performance
资金
- National Natural Science Foundation of China [62074148, 61875194, 11727902, 12074372, 11774341, 11974344, 61975204, 11804335]
- National Ten Thousand Talent Program for Young Top-notch Talents
- Key Research and Development Program of Changchun City [21ZY05]
- 100 Talents Program of the Chinese Academy of Sciences, Youth Innovation Promotion Association, CAS [2020225]
- Jilin Province Science Fund [20210101145JC]
In this study, a high-quality single beta-Ga2O3 microbelt photodetector is fabricated using low-pressure chemical vapor deposition and in situ atmospheric pressure annealing techniques. The device exhibits high responsivity, low dark current, high speed, and excellent wavelength selectivity, indicating its potential for high-performance solar-blind UV photodetection.
An ideal solar-blind photodetector should possess high responsivity, low dark current, high speed, high spectral selectivity, high stability and a facile fabrication method. In this work, a high-quality single beta-Ga2O3 microbelt photodetector is fabricated through low-pressure chemical vapor deposition and in situ atmospheric pressure annealing techniques. Due to the high quality and low defect density, this device shows a peak responsivity of 9.47 A W-1 at 256 nm, a dark current of 1 pA and an ultrashort fall time of 1.37 mu s under 20 V bias. Moreover, an ultrahigh specific detectivity of similar to 10(14) Jones and an extremely large solar-blind/ultraviolet A rejection ratio of nearly 10(5) have also been achieved, suggesting the excellent sensitivity and wavelength selectivity of our single beta-Ga2O3 microbelt photodetector. Besides that, the beta-Ga2O3 microbelt photodetector exhibits excellent mechanical and long-term stabilities. Our findings provide a facile and promising route to develop high performance solar-blind UV photodetectors.
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