期刊
JOURNAL OF MATERIALS SCIENCE
卷 57, 期 28, 页码 13300-13313出版社
SPRINGER
DOI: 10.1007/s10853-022-07472-6
关键词
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By investigating the interfacial reactions related to the TiN layer growth process between nanocrystalline epitaxial layers of AlN and a Ti-containing metal brazing or sintering layer, it was found that the TiN layer produced at the metal/AlN interfaces consisted of TiN particles smaller than 50 nm and grain boundary phases including Al-containing Ag and Al-containing Cu. The concentration of Al within the TiN layer decreased as the distance increased from the AlN epitaxial layer, indicating the existence of a local Al-based eutectic liquid phase and elemental transport through this eutectic liquid phase.
Interfacial reactions related to the TiN layer growth process between nanocrystalline epitaxial layers of AlN deposited on c-plane sapphire and a Ti-containing metal brazing or sintering layer using Ag-Cu-TiH2, Ag-TiH2 and Cu-TiH2 pastes have been investigated. The brazed/sintered samples were heated in vacuum at 850 degrees C for 30 min. The TiN layer produced at the metal/AlN interfaces consists of TiN particles < 50 nm in size and grain boundary phases including Al-containing Ag and Al-containing Cu. The Al concentration within the TiN layer decreases as the distance increases from the AlN epitaxial layer. These experimental observations all suggest that when AlN is used as a starting material in the active metal bonding method, interfacial reaction processes take place with the generation of a local Al-based eutectic liquid phase and elemental transport through this eutectic liquid phase.
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