Tutorial: Piezoelectric and magnetoelectric N/MEMS-Materials, devices, and applications

Nano-and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical and mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices based on magnetoelectrics are gaining much attention. Unlike electrostatic or piezoelectric N/MEMS that rely on an AC electric field or voltage excitation, magnetoelecric N/MEMS rely on the electromechanical resonance of a magnetostrictive/piezoelectric bilayer heterostructure exhibiting a strong strain -mediated magnetoelectric coupling under the excitation of a magnetic field and/or electric field. As a consequence, magnetoelectric N/MEMS enable unprecedented new applications, ranging from magnetoelectric sensors, ultra-compact magnetoelectric antennas, etc. This Tutorial will first outline the fundamental principles of piezoelectric materials, resonator design, specifically different acoustic modes, and piezoelectric-based N/MEMS applications, i.e., radio frequency front end filters and infrared radiation sensors. We will then provide an overview of magnetoelectric materials and N/MEMS focusing on the governing physics of the magnetoelectric effect, magnetic material properties for achieving high magnetoelectric coupling, state-of-the-art magnetoelectric N/MEMS devices, and their respective applications. Published under an exclusive license by AIP Publishing.

Automated summary

This article introduces N/MEMS technology, with a particular focus on devices based on the magnetoelectric effect. Magnetoelectric N/MEMS couple electrical and mechanical energy using electromechanical resonance under the excitation of a magnetic field and/or electric field, enabling new applications. The tutorial covers the basic principles of piezoelectric materials, resonator design, applications of piezoelectric N/MEMS, as well as the physics, magnetic material properties, state-of-the-art devices, and applications of magnetoelectric N/MEMS.