Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature

RB-SiC ceramic is one of the most important and useful materials as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP) process via oxygen (O-2), which is based on the precision grinding process in surface technology to modify at room temperature for grinding with a combination of plasma oxidation surface modification, is proposed. To identify the performance of the proposed cold atmospheric plasma process via oxygen method on the surface modification of RB-SiC ceramic fabrication of the precision grinding process, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, surface-modified layer and mathematical model of the grinding trajectory via the point P(A(i), A(j)) model analysis were conducted to investigate the effect of the composite process on grinding force and the mechanism of surface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provide a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the experimental test design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of surface modified layer material removal during precision grinding were solved.

Automated summary

This paper presents a study on the surface modification of RB-SiC ceramic using cold atmospheric plasma (CAP) process. Through precision grinding tests and mathematical model analysis, the effect of the composite process on grinding force and surface material removal mechanism is revealed, and the technical difficulties in RB-SiC ceramic fabrication are solved.