期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 69, 期 8, 页码 4486-4493出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2022.3185965
关键词
Tunneling; Logic gates; Leakage currents; Current measurement; Silicon carbide; Electron traps; Transient analysis; Device reliability; metal-oxide-semiconductor (MOS); nonradiative multi-phonon (NMP); SiC MOSFET; stress-induced leakage current (SILC); trap-assisted tunneling (TAT)
资金
- Austrian Federal Ministry for Digital and Economic Affairs
- National Foundation for Research, Technology and Development
- Christian Doppler Research Association
In this study, the extended two-state model was used to reproduce leakage current characteristics of two selected technologies. The temperature-activated leakage mechanism in the first technology was identified to have charge transition centers distributed within a few nanometers from the interface. In the second technology, self-trapped electrons were identified as a likely cause for the characteristics and transient charge trapping currents.
Using the framework developed in the first part of this work, we demonstrate the capabilities of the extended two-state model by reproducing leakage current characteristics of two selected technologies. First, we identify the temperature-activated leakage mechanism in /stacks using a tens of nanometer thick thermally grown oxide as through defects. Interestingly, this effect can be reproduced with the same parameters in a /stack with deposited oxide. Our simulations demonstrate that these charge transition centers are distributed within only a few nanometers from the /interface. The low thermal activation of the leakage current is linked to the low relaxation energies of the involved traps compared with those typically involved in and . Second, a similar mechanism can explain characteristics and transient charge trapping currents in capacitors with a insulating layer. By comparison of our model parameters to theoretical calculations, we identify self-trapped electrons (polarons) as a likely cause for these effects, as they have the required low relaxation energies.
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