期刊
IEEE SENSORS JOURNAL
卷 22, 期 14, 页码 14038-14043出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2022.3177619
关键词
Midinfrared; anodic aluminum oxide (AAO); nanoporous material; acetone; gas sensor
资金
- NIH [GM132705-02]
- NSF Precise Advanced Technologies and Health Systems for Underserved Populations (PATHS-UP) Engineering Research Center [1648451]
- Texas A&M University Presidential X-Grant
Real-time and non-destructive acetone vapor detection was successfully achieved using a miniaturized mid-infrared sensor. The sensor consisted of an ultrathin nanoporous anodic aluminum oxide membrane and a polydimethylsiloxane micro-gas chamber, providing high specificity and sensitivity.
Real-time and non-destructive acetone vapor detection was demonstrated using a miniaturized midinfrared (mid-IR) sensor. The sensing device was made of ultrathin nanoporous anodic aluminum oxide (AAO) mem brane embedded in a polydimethylsiloxane(PDMS) micro-gaschamber. The AAO membrane is transparent in the range of 2.5-5.5 mu m that covers the characteristic acetone vapor absorption bands, thus providing high specificity and sensitivity for acetone vapor detection. Real-time monitoring of acetone vapor pulses was performed at lambda = 2.9, 3.3, and 3.4 mu m. The sensitivity of the AAO membrane increased at a smaller nanopore diameter (D) and a larger pore density (N). A 5 parts per million (ppm) sensitivity was demonstrated utilizing a D = 20 nm AAO with a large surface area (S) of 715 cm(2). Hence, our compact mid-IR AAO sensor provides a new device platform for in-situ and accurate acetone gas detection.
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