期刊
APPLIED PHYSICS LETTERS
卷 121, 期 7, 页码 -出版社
AIP Publishing
DOI: 10.1063/5.0092988
关键词
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资金
- National Natural Science Foundation of China
- Huxiang Youth Talent Program of Hunan Province
- Science and Technology Innovation Program of Hunan Province
- Special Funding for the Construction of Innovative Provinces in Hunan Province
- National Key Research and Development Program of China
- [61975241]
- [52173192]
- [2020RC3010]
- [2020RC4004]
- [2020GK2024]
- [2017YFA0206600]
This study proposes a method for fabricating high-k AlOx dielectric film and demonstrates the low-voltage flexible OTFTs made using this film. The surface morphology of the semiconductor film is optimized by controlling the solid solubility in the semiconductor solution. The prepared OTFTs exhibit excellent electrical performance.
High-k dielectrics are frequently used for organic thin-film transistors (OTFTs), which facilitate the reduction of the device's operating voltage and enhance the total electrical performance. Along these lines, in this work, the fabrication of high-k AlOx dielectrics with high capacitance and low leakage current is proposed. On top of that, low-voltage flexible OTFTs with a solution-processed 2,7-dioctyl benzothieno[3,2-b] benzothiophene channel layer were demonstrated. The AlOx dielectric film was deposited by employing the reactive magnetron sputtering technique from a metal Al target by using a gas mixture of Ar and O-2 at room temperature. At the same time, the surface morphology of the semiconductor film was optimized by controlling the solid solubility of polystyrene and polymethyl methacrylate in the semiconductor solution, which is important for improving the device performance. In this way, the prepared flexible OTFTs showed a low operating voltage of 3 V, a high switch ratio of 4.2 x 10(7), a high mobility is 2.39 cm(2)/V s, and a steep subthreshold swing close to the theoretical limit of 68 mV/decade. It is, thus, expected that this method will be applicable to the development of high-performance OTFTs. Published under an exclusive license by AIP Publishing.
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