期刊
APPLIED PHYSICS EXPRESS
卷 15, 期 8, 页码 -出版社
IOP Publishing Ltd
DOI: 10.35848/1882-0786/ac7ddb
关键词
PVD-AlN; buffer free; crack-free GaN; low RF loss; coalescence growth
资金
- National Key Research and Development Program of China [2021YFB3600901, 2018YFE0125700]
- National Natural Science Foundation of China [61922001, 61927806]
- Beijing Municipal Science and Technology Project [Z211100004821007]
- Key Research and Development Program of Guangdong Province [2020B010171002]
Buffer-free GaN layers with a thickness of 1.5 μm can be directly grown on PVD-AlN/Si templates using delayed coalescence growth. The low density and large size AlN nuclei in PVD-AlN, together with the 3D growth mode of GaN, contribute to crack-free growth.
We demonstrate 1.5 mu m thick buffer-free GaN layers directly on physical vapor deposited (PVD) AlN/Si templates via delayed coalescence growth. The full width of half maximum of the X-ray diffraction rocking curves for GaN (002)/(102) planes are 525/527 arcsec. The PVD-AlN with low density and large size AlN nuclei, combined with 3D growth mode of the GaN, contribute to the delayed coalescence growth and thus crack-free GaN layers. The PVD-AlN can also effectively suppress the Ga/Al diffusion and lead to a low radio frequency loss of 0.20 dB mm(-1) at 10 GHz for the GaN layers.
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