期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 128, 期 8, 页码 -出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-022-05801-9
关键词
Femtosecond laser direct writing; Silicon carbide crystals; Optical waveguides; Micro-Raman spectra
资金
- National Natural Science Foundation of China [12174222, 11874239]
- Natural Science Foundation of Shandong Province [ZR2021ZD02]
- Taishan Scholars Program of Shandong Province
The fabrication of various waveguide structures in 4H-SiC crystals using femtosecond laser direct writing was successful. The polarization sensitivity of the waveguides can be modulated by altering the spatial distribution of femtosecond laser-modified areas. The rectangular depressed-cladding waveguide may play an important role in nonlinear frequency conversion, and the crystal network in the waveguide core remains almost undamaged.
The dual-line waveguides, vertical-dual-line waveguides, and rectangular depressed-cladding waveguides have been fabricated in 4H-SiC crystals by femtosecond laser direct writing. Dual-line waveguides can only support guidance along n(e) polarization, vertical-dual-line waveguides can only support guidance along n(o) polarization, and rectangular depressed-cladding waveguides can support guidance along both n(o) and n(e) polarizations. These results indicate that, by altering spatial distribution of femtosecond-laser-modified areas, one could modulate the polarization sensitivity of 4H-SiC waveguides. Additionally, in consideration of the unique 2D-guidance feature, it can be predicted that rectangular depressed-cladding waveguide would play an important role in nonlinear frequency conversion. By collecting and analyzing micro-Raman spectra, it has been found that crystal network is almost undamaged in waveguide core. This work is not only significant to construct polarization-dependent devices, but also important to realize many photonic applications (e.g., frequency conversion) in nonlinear optics.
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