4.8 Article

Band Offsets of the MOCVD-Grown β-(Al0.21Ga0.79)2O3/β-Ga2O3 (010) Heterojunction

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 14, 期 29, 页码 33944-33951

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.2c04177

关键词

beta-aluminum gallium oxide; band offset; X-ray photoelectron spectroscopy (XPS); Tauc plots; metal-organic chemical vapor deposition (MOCVD); heterostructure

资金

  1. National Science Foundation [1757979]
  2. Center for Advanced Surface Engineering, under the National Science Foundation [IIA-1457888]
  3. Arkansas EPSCoR Program, ASSET III
  4. NISE - NSWC Crane
  5. AFOSR and ONR [IIA-1457888, EEC-1449548]
  6. National Science Foundation Engineering Research Center for Power Optimization of Electro-Thermal Systems (POETS)
  7. [FA9550-7-P-0029]
  8. [N00014-16-P-2058]
  9. Div Of Engineering Education and Centers
  10. Directorate For Engineering [1757979] Funding Source: National Science Foundation

向作者/读者索取更多资源

The band offsets for the beta-(Al0.21Ga0.79)(2)O-3/beta-Ga2O3 (010) heterojunction were experimentally measured, and the resulting band alignment was determined to be of type II. These findings provide valuable data for the design and prediction of beta-(AlxGa1-x)(2)O-3 heterojunction-based devices.
The band offsets for the beta-(Al0.21Ga0.79)(2)O-3/beta-Ga2O3 (010) heterojunction have been experimentally measured by X-ray photoelectron spectroscopy. High-quality beta-(Al0.21Ga0.79)(2)O-3 films were grown by metal-organic chemical vapor deposition for characterization. The indirect band gap of beta-(Al0.21Ga0.79)(2)O-3 was determined by optical transmission to be 4.69 +/- 0.03 eV with a direct transition of 5.37 +/- 0.03 eV, while beta-Ga2O3 was confirmed to have an indirect band gap of 4.52 +/- 0.03 eV with a direct transition of 4.94 +/- 0.03 eV. The resulting band alignment at the heterojunction was determined to be of type II with the valence and conduction band edges of beta-(Al0.21Ga0.79)(2)O-3 being -0.26 +/- 0.08 and 0.43 +/- 0.08 eV, respectively, above those of beta-Ga2O3 (010). These values can now be used to help better design and predict the performance of beta-(AlxGa1-x)(2)O-3 heterojunction-based devices.

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