期刊
FRONTIERS OF OPTOELECTRONICS
卷 15, 期 1, 页码 -出版社
HIGHER EDUCATION PRESS
DOI: 10.1007/s12200-022-00012-9
关键词
Thermo-optic phase shifter; Photonic integrated circuits (PICs); Optical switches; Silicon photonics
资金
- Chuan-Yu Cooperation Project [Cstc2020jscx-cy1hX0006]
- Chongqing Science and Technology Commission of China [cstc2020jscx-msxm0099, cstc2020jscx-msxm0100]
- Chongqing Natural Science Foundation of China [cstc2020jcyj-msxm3725]
Silicon photonic platforms have significant importance in various applications and therm-optic phase shifters play a crucial role. To achieve better performance and lower costs, TOPS with various merits are needed. Different types of TOPS have been proposed and experimentally demonstrated.
Silicon photonic platforms offer relevance to large markets in many applications, such as optical phased arrays, photonic neural networks, programmable photonic integrated circuits, and quantum computation devices. As one of the basic tuning devices, the thermo-optic phase shifter (TOPS) plays an important role in all these applications. A TOPS with the merits of easy fabrication, low power consumption, small thermal time constant, low insertion loss, small footprint, and low crosstalk, is needed to improve the performance and lower the cost of the above applications. To meet these demands, various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper, we review the state-of-the-art of TOPS, including metal heater, doped silicon, silicide, with silicon substrate undercut for heat insulation, folded waveguide structure, and multi-pass waveguide structure. We further compare these TOPSs and propose the directions of the future developments on TOPS.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据