期刊
APL PHOTONICS
卷 7, 期 5, 页码 -出版社
AIP Publishing
DOI: 10.1063/5.0088424
关键词
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资金
- MITRE for the Quantum Moonshot Program
- DARPA ONISQ program
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-SC0012704]
- NSF RAISE TAQS program
- Center for Integrated Nanotechnologies
- U.S. Department of Energy Office of Science
Visible-wavelength very large-scale integration photonic circuits have the potential to be important in quantum information and sensing technologies. This article reports a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, demonstrating linear phase and amplitude modulation, low insertion loss, and high contrast.
Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V-pi cm in differential operation, -1.5 to -2 dB insertion loss, and up to 40 dB contrast in the 700-780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ~ 40, further decreases the operating voltage down to 0.15 V-pi cm. (C) 2022 The MITRE Corporation.
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