期刊
ADVANCED MATERIALS TECHNOLOGIES
卷 7, 期 9, 页码 -出版社
WILEY
DOI: 10.1002/admt.202101695
关键词
3D laser lithography; kinoforms; multi-photon polymerization; X-ray microscopy; X-ray optics
资金
- Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy for the Excellence Cluster 3D Matter Made to Order [EXC 2082/1-390761711]
- Carl Zeiss Foundation
- Helmholtz program Materials Systems Engineering
- Karlsruhe School of Optics and Photonics (KSOP)
- Projekt DEAL
This study successfully fabricated X-ray optics with higher resolution using a custom-built 3D laser lithography system and verified it through microscopy imaging. This is of significant importance for high-resolution X-ray microscopy and has the potential to reduce the manufacturing cost of X-ray lenses.
Efficient focusing of X-rays is essential for high-resolution X-ray microscopy. Diffractive X-ray optics called kinoforms offer the highest focusing efficiencies in theory. However, they have long remained unavailable due to their challenging nanofabrication. Recently, various X-ray optic geometries including kinoforms have been realized using 3D laser lithography at near-infrared wavelengths. As the smallest features (period) of the kinoform determines the resolving power, there is a natural drive to find ways to fabricate kinoforms with ever smaller features. Here, a custom-built 3D laser lithography setup with an excitation wavelength of 405 nm is used, which allows to half the smallest period of the kinoforms compared to previous work. A 40% improvement in scanning transmission X-ray microscopy image resolution, that is, a cutoff resolution of 145 nm, and an efficiency of 7.6% at 700 eV is achieved. A reconstructed pixel size of 18.5 nm, reaching the limit imposed by the design of the microscopy set-up, is demonstrated through ptychographic imaging of a magnetic sample which has a strongly reduced contrast mechanism. Moreover, X-ray lenses manufactured by 405 nm 3D laser lithography have the potential to become much less expensive than X-ray lenses made by other means.
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