Characterizations of Single-Crystal Lithium Niobate Thin Films

Single-crystal lithium niobate thin films (lithium niobate on insulator, LNOI) are becoming a new material platform for integrating photonics. Investigation into the physical properties of LNOI is important for the design and fabrication of photonic devices. Herein, LNOIs were prepared by two methods: ion implantation and wafer bonding; and wafer bonding and grinding. High-resolution X-ray diffraction (HRXRD) and confocal Raman spectroscopy were used to study the LNOI lattice properties. The full-width at half-maximum (FWHM) of HRXRD and Raman spectra showed a regular crystal lattice arrangement of the LNOIs. The domain inversion voltage and electro-optical coefficient of the LNOIs were close to those of LN bulk material. This study provides useful information for LNOI fabrication and for photonic devices in LNOI.

Automated summary

In this study, single-crystal lithium niobate thin films (LNOI) were prepared by two methods and their lattice properties were studied using HRXRD and confocal Raman spectroscopy. The results showed a regular crystal lattice arrangement of the LNOIs and their electrical performance parameters were close to LN bulk material, providing useful information for LNOI fabrication and photonic devices.