4.6 Article

β-Ga2O3-Based Power Devices: A Concise Review

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

The role of surface pretreatment by low temperature O2 gas annealing for β-Ga2O3 Schottky barrier diodes

Haodong Hu et al.

Summary: This study investigates the improvement of electrical performance in beta-Ga2O3 based Schottky barrier diodes (SBDs) through low temperature O-2 gas annealing pretreatment. The results show improved electrical performance and uniformity, indicating that passivation of oxygen vacancies at the surface and lowering of Schottky barrier height (SBH) occur during this pretreatment. X-ray photoelectron spectroscopy (XPS) measurements and first-principles modeling provide insights into the mechanism, revealing that the SBH lowering is consistent with the change in interface dipole at the W/Ga2O3 interface and is caused by the elimination of V-O. This work demonstrates an effective approach to enhance the electrical performance of beta-Ga2O3 SBDs by engineering the interface.

APPLIED PHYSICS LETTERS (2022)

Article Engineering, Electrical & Electronic

Enhancement of Thermal Transfer From beta-Ga2O3 Nano-Membrane Field-Effect Transistors to High Thermal Conductivity Substrate by Inserting an Interlayer

Jinhyun Noh et al.

Summary: The role of a HfO2 or ZrO2 interlayer as a thermal bridge between a beta-Ga2O3 channel and a sapphire substrate was studied. Inserting a thin HfO2 or ZrO2 interlayer can reduce the temperature increase of the beta-Ga2O3 channel and improve the performance of the device.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2022)

Article Materials Science, Ceramics

Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing

Soheil Mobtakeri et al.

Summary: The study investigated the effects of deposition pressure and growth power on the properties of Ga2O3 thin films deposited on sapphire and n-Si substrates. SEM images revealed a transition from 2D growth mode to 3D columnar growth mode with increasing deposition pressure. Annealing resulted in larger grain formation and similar transmittance values for thin films grown at different pressures. Additionally, a red shift in absorption edges and a decrease in band gap values were observed with increasing growth pressure.

CERAMICS INTERNATIONAL (2021)

Article Physics, Multidisciplinary

Self-powered solar-blind photodiodes based on EFG-grown (100)-dominant β-Ga2O3 substrate

Xu-Long Chu et al.

Summary: In this study, EFG-grown beta-Ga2O3-based Schottky photodiodes were reported, demonstrating low leakage current and high rectified ratio. The photodiode detector showed excellent performance at zero bias, indicating potential advancement in solar-blind photodetectors.

CHINESE PHYSICS B (2021)

Article Engineering, Electrical & Electronic

Experimental Study on Static and Dynamic Characteristics of Ga2O3 Schottky Barrier Diodes With Compound Termination

Yuxi Wei et al.

Summary: This study proposes an ultrafast reverse recovery beta-Ga2O3 Schottky barrier diode with improved breakdown voltage, featuring a compound termination design. The compound termination effectively reduces reverse leakage current, enhances reverse recovery and breakdown characteristics, showing great potential for high power and high-frequency applications.

IEEE TRANSACTIONS ON POWER ELECTRONICS (2021)

Article Engineering, Electrical & Electronic

Double-Barrier β-Ga2O3 Schottky Barrier Diode With Low Turn-on Voltage and Leakage Current

Wenhao Xiong et al.

Summary: This study demonstrates a β-Ga2O3 double-barrier Schottky barrier diode (DBSBD) with low turn-on voltage and low reverse leakage current by utilizing Ni and PtOx as the anode electrode and modulating the barrier height of PtOx-based diode through adjusting oxygen pressure during sputtering processes. The optimized DBSBD shows high forward current, low on-resistance, low turn-on voltage, and relatively low reverse leakage current compared to a Ni-SBD, attributed to the suppression of edge leakage current due to the double-barrier contact. The double-barrier design strategy provides a new device structure for advanced power electronics by balancing the forward and reverse characteristics in SBD.

IEEE ELECTRON DEVICE LETTERS (2021)

Article Engineering, Electrical & Electronic

Switching Performance Analysis of 3.5 kV Ga2O3 Power FinFETs

Zhe Ashley Jian et al.

Summary: This article analyzed the switching performance of a normally-off 3.5 kV beta-Ga2O3 power FinFET using Silvaco TCAD simulation platform. By comparing FinFETs with different structures, it was found that the fully-filled (FF) FinFET showed improved OFF-state capacitances and reduced peak electric field. Through TCAD simulations, it was determined that device performance could be significantly enhanced by optimizing substrate thickness and electron mobilities in different regions of the FinFET.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2021)

Article Engineering, Electrical & Electronic

Channel Properties of Ga2O3-on-SiC MOSFETs

Yibo Wang et al.

Summary: This study reports the significant improvement in mobility of GaOSiC MOSFETs with increasing postannealing temperature of Ga2O3 channel, indicating defects induced by ion-cutting process can be eliminated by high-temperature annealing. Additionally, the decrease in mobility within the accumulation regime of GaOSiC MOSFETs with increasing ambient temperature follows a T-amb(-1) law limited by phonon scattering.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2021)

Article Physics, Applied

Thermal management strategies for gallium oxide vertical trench-fin MOSFETs

Robert H. Montgomery et al.

Summary: By using a thermally conductive dielectric over the MOSFET structure and bonding thermal spreaders to its topside, significant improvements in device power density and thermal performance can be achieved.

JOURNAL OF APPLIED PHYSICS (2021)

Article Physics, Multidisciplinary

Photoresponsive characteristics of EFG-grown iron-doped (100) Ga2O3 substrate with low dark current

Xulong Chu et al.

Summary: In this study, a Fe-doped Ga2O3 substrate was utilized to fabricate a solar-blind UV photodetector, showing low dark current and high responsivity.

PHYSICA SCRIPTA (2021)

Article Chemistry, Physical

Improved Electrical Characteristics of Gallium Oxide/P-Epi Silicon Carbide Static Induction Transistors with UV/Ozone Treatment Fabricated by RF Sputter

Myeong-Cheol Shin et al.

Summary: In this study, static induction transistors (SITs) with beta gallium oxide (beta-Ga2O3) channels were grown on a p-epi silicon carbide (SiC) layer via radio frequency sputtering. The Ga2O3 films were treated with UV/ozone, producing reduced oxygen vacancies, lower surface roughness and resistivity, and higher mobility. The UV/O-3-treated SITs exhibited significantly higher drain current and on/off ratio compared to non-treated control devices.

MATERIALS (2021)

Article Materials Science, Multidisciplinary

Simulation Study of Performance Degradation in β-Ga2O3 (001) Vertical Schottky Barrier Diodes Based on Anisotropic Mobility Modeling

Zhipeng Li et al.

Summary: This study investigates the degradation of on-state characteristics in beta-gallium oxide devices and proposes an anisotropic mobility modeling approach to accurately calculate the electrical performances and predict device performance more accurately. The revised model parameters show a significant reduction in electron mobility perpendicular to the device surface, leading to an increased on-resistance and degraded static forward mode, but a lower reverse current peak for switching characteristics.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2021)

Article Chemistry, Analytical

Electrical Characterizations of Planar Ga2O3 Schottky Barrier Diodes

Shiyu Zhang et al.

Summary: In this work, an SBD based on EFG Ga2O3 crystal substrate is fabricated and characterized. Electrical parameters such as Ron, φB, n, Rs, and Nd are extracted systematically by analyzing J-V and C-V curves of the device. The detailed measurements and theoretical analysis are presented in this paper.

MICROMACHINES (2021)

Article Chemistry, Multidisciplinary

Interface Trap-Induced Temperature Dependent Hysteresis and Mobility in β-Ga2O3 Field-Effect Transistors

Youngseo Park et al.

Summary: This study investigates the effects of interface traps on mobility degradation at low temperature and hysteresis at high temperature by characterizing the electrical properties of the device in a temperature range of 20-300 K. The freezing of acceptor-like traps at the interface below 230 K leads to negligible hysteresis but significant degradation in channel mobility. Additionally activated traps as the temperature increases result in the decrease of time constants for trapping and de-trapping processes of activated trap charges in response to the gate pulse bias.

NANOMATERIALS (2021)

Article Physics, Multidisciplinary

Degradation of β-Ga2O3 Schottky barrier diode under swift heavy ion irradiation

Wen-Si Ai et al.

Summary: The electrical characteristics and microstructures of beta-Ga2O3 Schottky barrier diode devices irradiated with swift heavy ions, particularly 2096 MeV Ta ions, were studied. It was observed that the devices showed reliability degradation after irradiation, with changes in turn-on voltage, on-resistance, ideality factor, and reverse leakage current density. The latent tracks induced by Ta ions bombardments were found to be the main cause for the degradation in electrical characteristics.

CHINESE PHYSICS B (2021)

Article Engineering, Electrical & Electronic

Demonstration of the p-NiOX/n-Ga2O3 Heterojunction Gate FETs and Diodes With BV2/Ron,sp Figures of Merit of 0.39 GW/cm2 and 1.38 GW/cm2

Chenlu Wang et al.

Summary: This study demonstrates the achievement of high-performance beta-Ga2O3 power devices by incorporating p-type NiOX. The p-n heterojunction diodes and gate field-effect-transistors both show state-of-the-art power figure of merit, providing insights for the development of Ga2O3 power devices.

IEEE ELECTRON DEVICE LETTERS (2021)

Article Engineering, Electrical & Electronic

Realizing High-Performance β-Ga2O3 MOSFET by Using Variation of Lateral Doping: A TCAD Study

Xuanze Zhou et al.

Summary: A variation of lateral doping (VLD) technique was proposed to enhance blocking voltage and ON-resistance properties in lateral beta-Ga2O3 MOSFET, achieving enhancement-mode operation and significantly higher transconductance compared to uniformly doped (UD) transistor. The design also resulted in suppressed OFF-state electric field and higher blocking voltage, with a power figure of merit reaching 332.7 MW/cm(2). This new structure offers a new design strategy for high-power beta-Ga2O3 MOSFETs.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2021)

Article Chemistry, Physical

Fluorine-based plasma treatment for hetero-epitaxial β-Ga2O3 MOSFETs

Yeong Je Jeong et al.

Summary: The electrical characteristics of beta-Ga2O3 film were significantly improved using CF4 plasma treatment, allowing the MOSFET to exhibit improved field-effect mobility and on/off ratio. The incorporation of fluorine enhanced both surface and bulk properties of the material, leading to successful ohmic contact formation without post-thermal annealing.

APPLIED SURFACE SCIENCE (2021)

Article Engineering, Electrical & Electronic

High-k Oxide Field-Plated Vertical (001) β-Ga2O3 Schottky Barrier Diode With Baliga's Figure of Merit Over 1 GW/cm2

Saurav Roy et al.

Summary: By introducing a novel extreme permittivity dielectric field oxide, a vertical (001) beta-Ga2O3 field-plated Schottky barrier diode with high breakdown voltage was successfully fabricated in this study. TCAD simulations show that the surface breakdown electric field of the device reaches as high as 5.45 MV/cm, demonstrating the huge potential of Ga2O3 power devices for multi-kilovolt class applications.

IEEE ELECTRON DEVICE LETTERS (2021)

Article Engineering, Electrical & Electronic

β-(Al0.18Ga0.82)2O3/Ga2O3 Double Heterojunction Transistor With Average Field of 5.5 MV/cm

Nidhin Kurian Kalarickal et al.

Summary: Using a composite dielectric layer can reduce the peak electric field and improve breakdown performance in ultra-wide band gap semiconductors like beta-Ga2O3. By integrating high permittivity dielectric materials with ultra-wide band gap semiconductors, significant improvements in breakdown performance can be achieved.

IEEE ELECTRON DEVICE LETTERS (2021)

Article Engineering, Electrical & Electronic

Improvement of β-Ga2O3 MIS-SBD Interface Using Al-Reacted Interfacial Layer

Minghao He et al.

Summary: This study demonstrates a beta-Ga2O3 MIS-SBD with Al-reacted aluminum oxide interlayer, showing significantly improved SS compared to conventional MS SBD. The results suggest that the Al-reacted interlayer helps eliminate interface degradation and improves device performance compared to ALD Al2O3.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2021)

Article Engineering, Electrical & Electronic

Packaged Ga2O3 Schottky Rectifiers With Over 60-A Surge Current Capability

Ming Xiao et al.

Summary: This study presents the first experimental demonstrations of surge current capabilities of large-area Ga2O3 Schottky barrier diodes (SBDs) packaged in different configurations, showing high surge current capabilities of properly packaged Ga2O3 SBDs.

IEEE TRANSACTIONS ON POWER ELECTRONICS (2021)

Article Nanoscience & Nanotechnology

Analytical Model for the Channel Maximum Temperature in Ga2O3 MOSFETs

Xiaole Jia et al.

Summary: An accurate analytical model was proposed to estimate the channel maximum temperature of Ga2O3 MOSFETs, and its validity was demonstrated through numerical simulations. The model is instructive in effective thermal management of Ga2O3 MOSFETs.

NANOSCALE RESEARCH LETTERS (2021)

Article Materials Science, Multidisciplinary

Vertical β-Ga2O3 Schottky Barrier Diodes with Enhanced Breakdown Voltage and High Switching Performance

Xing Lu et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2020)

Article Engineering, Electrical & Electronic

Field-Plated Ga2O3 Trench Schottky Barrier Diodes With a BV2/R-on,R-sp of up to 0.95 GW/cm(2)

Wenshen Li et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

Enhancement-Mode β-Ga2O3 Current Aperture Vertical MOSFETs With N-Ion-Implanted Blocker

Man Hoi Wong et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

High-Voltage ((2)over-bar01) β-Ga2O3 Vertical Schottky Barrier Diode With Thermally-Oxidized Termination

Yuangang Wang et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

Self-Heating Characterization of $\beta$ -Ga2O3 Thin-Channel MOSFETs by Pulsed ${I}$ - ${V}$ and Raman Nanothermography

Nicholas A. Blumenschein et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Physics, Applied

Comparison of optoelectrical characteristics between Schottky and Ohmic contacts to β-Ga2O3 thin film

Zeng Liu et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)

Article Materials Science, Multidisciplinary

Electrical Properties of Sn-Doped α-Ga2O3 Films on m-Plane Sapphire Substrates Grown by Mist Chemical Vapor Deposition

Kazuaki Akaiwa et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2020)

Article Materials Science, Multidisciplinary

Enhancement-Mode β-Ga2O3 Metal-Oxide-Semiconductor Field-Effect Transistor with High Breakdown Voltage over 3000 V Realized by Oxygen Annealing

Yuanjie Lv et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2020)

Review Engineering, Electrical & Electronic

Gallium oxide-based solar-blind ultraviolet photodetectors

Xuanhu Chen et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2020)

Article Materials Science, Multidisciplinary

Temperature-dependent Schottky barrier parameters of Ni/Au on n-type (001) β-Ga2O3 Schottky barrier diode

P. R. Sekhar Reddy et al.

VACUUM (2020)

Article Physics, Applied

Temperature-dependent current-voltage characteristics of β-Ga2O3 trench Schottky barrier diodes

Zhe (Ashley) Jian et al.

APPLIED PHYSICS LETTERS (2020)

Article Engineering, Electrical & Electronic

Lateral beta-Ga2O3 MOSFETs With High Power Figure of Merit of 277 MW/cm(2)

Yuanjie Lv et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

Progress of Ultra-Wide Bandgap Ga < sub > 2 </sub > O < sub > 3 </sub > Semiconductor Materials in Power MOSFETs

Hongpeng Zhang et al.

IEEE TRANSACTIONS ON POWER ELECTRONICS (2020)

Article Physics, Applied

Modeling and analysis for thermal management in gallium oxide field-effect transistors

Chao Yuan et al.

JOURNAL OF APPLIED PHYSICS (2020)

Article Physics, Multidisciplinary

β-Ga2O3 MOSFETs on the Si substrate fabricated by the ion-cutting process

YiBo Wang et al.

SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY (2020)

Article Physics, Applied

Normally-off AlN/β-Ga2O3 field-effect transistors using polarization-induced doping

Kang Song et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)

Article Materials Science, Multidisciplinary

Temperature-Dependent Electrical Characteristics of Ni/Au Vertical Schottky Barrier Diodes on β-Ga2O3 Epilayers

Hardhyan Sheoran et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Engineering, Electrical & Electronic

Field-Plated Lateral Ga2O3 MOSFETs With Polymer Passivation and 8.03 kV Breakdown Voltage

Shivam Sharma et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Engineering, Electrical & Electronic

Designing Beveled Edge Termination in GaN Vertical p-i-n Diode-Bevel Angle, Doping, and Passivation

Ke Zeng et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Engineering, Electrical & Electronic

Leakage Current Reduction in β-Ga2O3 Schottky Barrier Diodes by CF4 Plasma Treatment

Haoxun Luo et al.

IEEE ELECTRON DEVICE LETTERS (2020)

Article Materials Science, Multidisciplinary

Fabrication and characterization of Mg-doped ε-Ga2O3 solar-blind photodetector

Zeng Liu et al.

VACUUM (2020)

Article Engineering, Electrical & Electronic

Guiding Principles for Trench Schottky Barrier Diodes Based on Ultrawide Bandgap Semiconductors: A Case Study in Ga2O3

Wenshen Li et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Engineering, Electrical & Electronic

Impact of Implanted Edge Termination on Vertical β-Ga2O3 Schottky Barrier Diodes Under OFF-State Stressing

Yanni Zhang et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Physics, Multidisciplinary

New high-voltage and high-speed β-Ga2O3 MESFET with amended electric field distribution by an insulator layer

Dariush Madadi et al.

EUROPEAN PHYSICAL JOURNAL PLUS (2020)

Article Materials Science, Multidisciplinary

Leakage Current Modelling and Optimization of β-Ga2O3 Schottky Barrier Diode with Ni Contact under High Reverse Voltage

Madani Labed et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Physics, Applied

Electro-thermal co-design of β-(AlxGa1-x)2O3/Ga2O3 modulation doped field effect transistors

Bikramjit Chatterjee et al.

APPLIED PHYSICS LETTERS (2020)

Article Engineering, Electrical & Electronic

Design of a β-Ga2O3 Schottky Barrier Diode With p-Type III-Nitride Guard Ring for Enhanced Breakdown

Saurav Roy et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Engineering, Electrical & Electronic

Deep-Recessed β-Ga2O3 Delta-Doped Field-Effect Transistors With In Situ Epitaxial Passivation

Chandan Joishi et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Materials Science, Multidisciplinary

Effect of Electron Injection on Minority Carrier Transport in 10 MeV Proton Irradiated β-Ga2O3 Schottky Rectifiers

Sushrut Modak et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Materials Science, Multidisciplinary

Ultra-Wide Bandgapβ-Ga2O3Heterojunction Field-Effect Transistor Using p-Type 4H-SiC Gate for Efficient Thermal Management

Dongryul Lee et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Materials Science, Multidisciplinary

Advanced TCAD Simulation and Calibration of Gallium Oxide Vertical Transistor

Hiu Yung Wong et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Materials Science, Multidisciplinary

Dual-field plated β-Ga2O3 nano-FETs with an off-state breakdown voltage exceeding 400 V

Jinho Bae et al.

JOURNAL OF MATERIALS CHEMISTRY C (2020)

Review Physics, Multidisciplinary

Review of gallium oxide based field-effect transistors and Schottky barrier diodes

Zeng Liu et al.

CHINESE PHYSICS B (2019)

Article Engineering, Electrical & Electronic

Raman Thermography of Peak Channel Temperature in β-Ga2O3 MOSFETs

J. W. Pomeroy et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Current Aperture Vertical β-Ga2O3 MOSFETs Fabricated by N- and Si-Ion Implantation Doping

Man Hoi Wong et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Evaluation of Low-Temperature Saturation Velocity in β-(AlXGa1-X)2O3/Ga2O3 Modulation-Doped Field-Effect Transistors

Yuewei Zhang et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2019)

Article Materials Science, Multidisciplinary

Device processing and junction formation needs for ultra-high power Ga2O3 electronics

Fan Ren et al.

MRS COMMUNICATIONS (2019)

Article Nanoscience & Nanotechnology

Asymmetric Double-Gate β-Ga2O3 Nanomembrane Field-Effect Transistor for Energy-Efficient Power Devices

Jiyeon Ma et al.

ADVANCED ELECTRONIC MATERIALS (2019)

Article Physics, Applied

Surface related tunneling leakage in β-Ga2O3 (001) vertical Schottky barrier diodes

Ravikiran Lingaparthi et al.

APPLIED PHYSICS EXPRESS (2019)

Article Engineering, Electrical & Electronic

Normally-Off Ga2O3 MOSFETs With Unintentionally Nitrogen-Doped Channel Layer Grown by Plasma-Assisted Molecular Beam Epitaxy

Takafumi Kamimura et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Materials Science, Multidisciplinary

A 800 V β-Ga2O3 Metal-Oxide-Semiconductor Field-Effect Transistor with High-Power Figure of Merit of Over 86.3 MW cm-2

Zhaoqing Feng et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2019)

Article Engineering, Electrical & Electronic

Ga2O3 metal-oxide-semiconductor field effect transistors on sapphire substrate by MOCVD

Ji-Hyeon Park et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate

J. Oh et al.

RESULTS IN PHYSICS (2019)

Article Nanoscience & Nanotechnology

Investigation of the Mechanism for Ohmic Contact Formation in Ti/Al/Ni/Au Contacts to β-Ga2O3 Nanobelt Field-Effect Transistors

Jin-Xin Chen et al.

ACS APPLIED MATERIALS & INTERFACES (2019)

Article Physics, Applied

MOCVD grown β-Ga2O3 metal-oxide-semiconductor field effect transistors on sapphire

Ji-Hyeon Park et al.

APPLIED PHYSICS EXPRESS (2019)

Article Engineering, Electrical & Electronic

Vertical Ga2O3 Schottky Barrier Diodes With Guard Ring Formed by Nitrogen-Ion Implantation

Chia-Hung Lin et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Fast Switching β-Ga2O3 Power MOSFET With a Trench-Gate Structure

Hang Dong et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Breakdown Characteristics of β-(Al0.22Ga0.78)2O3/Ga2O3 Field-Plated Modulation-Doped Field-Effect Transistors

Chandan Joishi et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Vertical Ga2O3 Schottky Barrier Diodes With Small-Angle Beveled Field Plates: A Baliga's Figure-of-Merit of 0.6 GW/cm2

Noah Allen et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Physics, Applied

Thin channel β-Ga2O3 MOSFETs with self-aligned refractory metal gates

Kyle J. Liddy et al.

APPLIED PHYSICS EXPRESS (2019)

Article Physics, Applied

Electrothermal performance limit of β-Ga2O3 field-effect transistors

Bikram K. Mahajan et al.

APPLIED PHYSICS LETTERS (2019)

Article Engineering, Electrical & Electronic

High-Performance Vertical β-Ga2O3 Schottky Barrier Diode With Implanted Edge Termination

Hong Zhou et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Lateral source field-plated β-Ga2O3 MOSFET with recorded breakdown voltage of 2360 V and low specific on-resistance of 560 mΩ cm2

Yuanjie Lv et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2019)

Article Physics, Applied

High-voltage vertical Ga2O3 power rectifiers operational at high temperatures up to 600 K

Boyan Wang et al.

APPLIED PHYSICS LETTERS (2019)

Article Engineering, Electrical & Electronic

Electrothermal Characteristics of Delta-Doped β-Ga2O3 Metal-Semiconductor Field-Effect Transistors

Nitish Kumar et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2019)

Article Nanoscience & Nanotechnology

Flexible β-Ga2O3 Nanomembrane Schottky Barrier Diodes

Edward Swinnich et al.

ADVANCED ELECTRONIC MATERIALS (2019)

Article Engineering, Manufacturing

Device-Level Thermal Management of Gallium Oxide Field-Effect Transistors

Bikramjit Chatterjee et al.

IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY (2019)

Article Engineering, Electrical & Electronic

Modeling of the Variation of Lateral Doping (VLD) Lateral Power Devices via 1-D Analysis Using Effective Concentration Profile Concept

Jun Zhang et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2019)

Article Materials Science, Multidisciplinary

2.32 kV Breakdown Voltage Lateral β-Ga2O3 MOSFETs with Source-Connected Field Plate

Jae Kyoung Mun et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

Simulation Study of Enhancement Mode Multi-Gate Vertical Gallium Oxide MOSFETs

Junsung Park et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

β-Ga2O3 Thin Film Based Lateral and Vertical Schottky Barrier Diode

Digangana Khan et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Engineering, Electrical & Electronic

High Performance Ga2O3 Metal-Oxide-Semiconductor Field-Effect Transistors on an AlN/Si Substrate

Dian Lei et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2019)

Review Materials Science, Multidisciplinary

Radiation damage effects in Ga2O3 materials and devices

Jihyun Kim et al.

JOURNAL OF MATERIALS CHEMISTRY C (2019)

Article Engineering, Electrical & Electronic

High Performance β-Ga2O3 Nano-Membrane Field Effect Transistors on a High Thermal Conductivity Diamond Substrate

Jinhyun Noh et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2019)

Article Materials Science, Multidisciplinary

Modeling and Analysis of Gallium Oxide Vertical Transistors

Ramchandra Kotecha et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

A high-performance ultraviolet solar-blind photodetector based on a β-Ga2O3 Schottky photodiode

Zeng Liu et al.

JOURNAL OF MATERIALS CHEMISTRY C (2019)

Article Materials Science, Multidisciplinary

Controlling the threshold voltage of β-Ga2O3 field-effect transistors via remote fluorine plasma treatment

Janghyuk Kim et al.

JOURNAL OF MATERIALS CHEMISTRY C (2019)

Review Materials Science, Multidisciplinary

Gallium oxide solar-blind ultraviolet photodetectors: a review

Jingjing Xu et al.

JOURNAL OF MATERIALS CHEMISTRY C (2019)

Article Materials Science, Multidisciplinary

High-Quality Schottky Barrier Diodes on β-Gallium Oxide Thin Films on Glass Substrate

Stefan Mueller et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

Electrical Properties of Thermally Annealed β-Ga2O3 Metal-Semiconductor Field-Effect Transistors with Pt/Au Schottky Contacts

Suhyun Kim et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)

Article Engineering, Electrical & Electronic

Source-Field-Plated beta-Ga2O3 MOSFET With Record Power Figure of Merit of 50.4 MW/cm(2)

Yuanjie Lv et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Physics, Applied

Low-pressure CVD-grown β-Ga2O3 bevel-field-plated Schottky barrier diodes

Chandan Joishi et al.

APPLIED PHYSICS EXPRESS (2018)

Article Physics, Applied

Demonstration of β-(AlxGa1-x)2O3/Ga2O3 double heterostructure field effect transistors

Yuewei Zhang et al.

APPLIED PHYSICS LETTERS (2018)

Article Engineering, Electrical & Electronic

Recessed-Gate Enhancement-Mode beta-Ga2O3 MOSFETs

Kelson D. Chabak et al.

IEEE ELECTRON DEVICE LETTERS (2018)

Article Engineering, Electrical & Electronic

Schottky Barrier Rectifier Based on (100) beta-Ga2O3 and its DC and AC Characteristics

Qiming He et al.

IEEE ELECTRON DEVICE LETTERS (2018)

Article Engineering, Electrical & Electronic

Enhancement-Mode Ga2O3 Vertical Transistors With Breakdown Voltage > 1 kV

Zongyang Hu et al.

IEEE ELECTRON DEVICE LETTERS (2018)

Article Engineering, Electrical & Electronic

Vertical Geometry, 2-A Forward Current Ga2O3 Schottky Rectifiers on Bulk Ga2O3 Substrates

Jiancheng Yang et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2018)

Editorial Material Physics, Applied

Guest Editorial: The dawn of gallium oxide microelectronics

Masataka Higashiwaki et al.

APPLIED PHYSICS LETTERS (2018)

Article Engineering, Electrical & Electronic

Recent progress in the growth of β-Ga2O3 for power electronics applications

Michele Baldini et al.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2018)

Article Engineering, Electrical & Electronic

A survey of acceptor dopants for beta-Ga2O3

John L. Lyons

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2018)

Article Materials Science, Multidisciplinary

2300V Reverse Breakdown Voltage Ga2O3 Schottky Rectifiers

Jiancheng Yang et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2018)

Review Physics, Applied

A review of Ga2O3 materials, processing, and devices

S. J. Pearton et al.

APPLIED PHYSICS REVIEWS (2018)

Article Materials Science, Multidisciplinary

Design consideration of high voltage Ga2O3 vertical Schottky barrier diode with field plate

J-H Choi et al.

RESULTS IN PHYSICS (2018)

Article Engineering, Electrical & Electronic

Lateral beta-Ga2O3 Schottky Barrier Diode on Sapphire Substrate With Reverse Blocking Voltage of 1.7 kV

Zhuangzhuang Hu et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2018)

Article Nanoscience & Nanotechnology

Heterostructure WSe2-Ga2O3 Junction Field-Effect Transistor for Low-Dimensional High-Power Electronics

Janghyuk Kim et al.

ACS APPLIED MATERIALS & INTERFACES (2018)

Article Materials Science, Multidisciplinary

High-insulating beta-Ga2O3 thin films by doping with a valence controllable Fe element

Yuanqi Huang et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2018)

Article Physics, Applied

Breakdown mechanism in 1 kA/cm2 and 960 V E-mode β-Ga2O3 vertical transistors

Zongyang Hu et al.

APPLIED PHYSICS LETTERS (2018)

Article Engineering, Electrical & Electronic

1.85 kV Breakdown Voltage in Lateral Field-Plated Ga2O3 MOSFETs

Ke Zeng et al.

IEEE ELECTRON DEVICE LETTERS (2018)

Article Physics, Applied

Impact ionization in β-Ga2O3

Krishnendu Ghosh et al.

JOURNAL OF APPLIED PHYSICS (2018)

Article Materials Science, Ceramics

Ga2O3 MOSFET Device with Al2O3 Gate Dielectric

Lv Yuan-Jie et al.

JOURNAL OF INORGANIC MATERIALS (2018)

Article Materials Science, Multidisciplinary

Tuning the Threshold Voltage of Exfoliated beta-Ga2O3 Flake-Based Field-Effect Transistors by Photo-Enhanced H3PO4 Wet Etching

Jongha Son et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2018)

Article Engineering, Electrical & Electronic

Abnormal Bias-Temperature Stress and Thermal Instability of β-Ga2O3 Nanomembrane field-Effect Transistor

Jiyeon Ma et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2018)

Article Physics, Multidisciplinary

A simulation study of field plate termination in Ga2O3 Schottky barrier diodes

Hui Wang et al.

CHINESE PHYSICS B (2018)

Article Instruments & Instrumentation

Thermal characterization of gallium oxide Schottky barrier diodes

Bikramjit Chatterjee et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2018)

Article Engineering, Electrical & Electronic

10 MeV proton damage in beta-Ga2O3 Schottky rectifiers

Jiancheng Yang et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2018)

Article Engineering, Electrical & Electronic

Eighteen mega-electron-volt alpha-particle damage in homoepitaxial beta-Ga2O3 Schottky rectifiers

Jiancheng Yang et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2018)

Article Materials Science, Multidisciplinary

Electrical Characteristics of Vertical Ni/β- Ga2O3 Schottky Barrier Diodes at High Temperatures

Sooyeoun Oh et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2017)

Article Engineering, Electrical & Electronic

Ge-Doped β-Ga2O3 MOSFETs

Neil Moser et al.

IEEE ELECTRON DEVICE LETTERS (2017)

Article Engineering, Electrical & Electronic

Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology

Ke Zeng et al.

IEEE ELECTRON DEVICE LETTERS (2017)

Article Engineering, Electrical & Electronic

First Demonstration of Ga2O3 Trench MOS-Type Schottky Barrier Diodes

Kohei Sasaki et al.

IEEE ELECTRON DEVICE LETTERS (2017)

Article Engineering, Electrical & Electronic

High Breakdown Voltage (-201) β-Ga2O3 Schottky Rectifiers

Jiancheng Yang et al.

IEEE ELECTRON DEVICE LETTERS (2017)

Article Engineering, Electrical & Electronic

Smart Power Devices and ICs Using GaAs and Wide and Extreme Bandgap Semiconductors

T. Paul Chow et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2017)

Article Materials Science, Multidisciplinary

Electron mobility in monoclinic -Ga2O3Effect of plasmon-phonon coupling, anisotropy, and confinement

Krishnendu Ghosh et al.

JOURNAL OF MATERIALS RESEARCH (2017)

Article Physics, Condensed Matter

Fundamental limits on the electron mobility of β-Ga2O3

Youngho Kang et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2017)

Article Materials Science, Multidisciplinary

Opportunities and Future Directions for Ga2O3

Michael A. Mastro et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2017)

Article Engineering, Electrical & Electronic

Heteroepitaxial Beta-Ga2O3 on 4H-SiC for an FET With Reduced Self Heating

Stephen A. O. Russell et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2017)

Article Multidisciplinary Sciences

Incomplete Ionization of a 110 meV Unintentional Donor in β-Ga2O3 and its Effect on Power Devices

Adam T. Neal et al.

SCIENTIFIC REPORTS (2017)

Article Nanoscience & Nanotechnology

Influence of High-Energy Proton Irradiation on β-Ga2O3 Nanobelt Field-Effect Transistors

Gwangseok Yang et al.

ACS APPLIED MATERIALS & INTERFACES (2017)

Article Physics, Applied

Modulation-doped β-(Al0.2Ga0.8)2O3/Ga2O3 field-effect transistor

Sriram Krishnamoorthy et al.

APPLIED PHYSICS LETTERS (2017)

Article Nanoscience & Nanotechnology

Quasi-Two-Dimensional h-BN/β-Ga2O3 Heterostructure Metal-Insulator-Semiconductor Field-Effect Transistor

Janghyuk Kim et al.

ACS APPLIED MATERIALS & INTERFACES (2017)

Article Physics, Applied

Enhancement-mode Ga2O3 MOSFETs with Si-ion-implanted source and drain

Man Hoi Wong et al.

APPLIED PHYSICS EXPRESS (2017)

Article Physics, Applied

Ge doping of β-Ga2O3 films grown by plasma-assisted molecular beam epitaxy

Elaheh Ahmadi et al.

APPLIED PHYSICS EXPRESS (2017)

Article Physics, Applied

1-kV vertical Ga2O3 field-plated Schottky barrier diodes

Keita Konishi et al.

APPLIED PHYSICS LETTERS (2017)

Article Materials Science, Multidisciplinary

Semiconducting Sn-doped β-Ga2O3 homoepitaxial layers grown by metal organic vapour-phase epitaxy

Michele Baldini et al.

JOURNAL OF MATERIALS SCIENCE (2016)

Article Physics, Applied

Toward controlling the carrier density of Si doped Ga2O3 films by pulsed laser deposition

Fabi Zhang et al.

APPLIED PHYSICS LETTERS (2016)

Article Physics, Applied

Effect of front and back gates on β-Ga2O3 nano-belt field-effect transistors

Shihyun Ahn et al.

APPLIED PHYSICS LETTERS (2016)

Article Engineering, Electrical & Electronic

Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V

Man Hoi Wong et al.

IEEE ELECTRON DEVICE LETTERS (2016)

Article Engineering, Electrical & Electronic

3.8-MV/cm Breakdown Strength of MOVPE-Grown Sn-Doped β-Ga2O3 MOSFETs

Andrew J. Green et al.

IEEE ELECTRON DEVICE LETTERS (2016)

Review Physics, Applied

Current status of Ga2O3 power devices

Masataka Higashiwaki et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2016)

Article Physics, Applied

Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer

Man Hoi Wong et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2016)

Article Chemistry, Physical

β-Ga2O3/p-Si heterojunction solar-blind ultraviolet photodetector with enhanced photoelectric responsivity

X. C. Guo et al.

JOURNAL OF ALLOYS AND COMPOUNDS (2016)

Article Chemistry, Physical

Exfoliated β-Ga2O3 nano-belt field-effect transistors for air-stable high power and high temperature electronics

Janghyuk Kim et al.

PHYSICAL CHEMISTRY CHEMICAL PHYSICS (2016)

Article Materials Science, Multidisciplinary

Communication-A (001) beta-Ga2O3 MOSFET with+2.9 V Threshold Voltage and HfO2 Gate Dielectric

Marko J. Tadjer et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2016)

Article Engineering, Electrical & Electronic

Mist-CVD Grown Sn-Doped α-Ga2O3 MESFETs

Giang T. Dang et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2015)

Article Materials Science, Multidisciplinary

Preparation and characterization of Sn-doped β-Ga2O3 homoepitaxial films by MOCVD

Xuejian Du et al.

JOURNAL OF MATERIALS SCIENCE (2015)

Article Physics, Applied

High-voltage field effect transistors with wide-bandgap β-Ga2O3 nanomembranes

Wan Sik Hwang et al.

APPLIED PHYSICS LETTERS (2014)

Article Materials Science, Multidisciplinary

Development of gallium oxide power devices

Masataka Higashiwaki et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2014)

Article Materials Science, Multidisciplinary

Fabrication of β-Ga2O3 thin films and solar-blind photodetectors by laser MBE technology

Daoyou Guo et al.

OPTICAL MATERIALS EXPRESS (2014)

Article Engineering, Electrical & Electronic

Ga2O3 Schottky Barrier Diodes Fabricated by Using Single-Crystal β-Ga2O3 (010) Substrates

Kohei Sasaki et al.

IEEE ELECTRON DEVICE LETTERS (2013)

Article Crystallography

MBE grown Ga2O3 and its power device applications

Kohei Sasaki et al.

JOURNAL OF CRYSTAL GROWTH (2013)

Article Engineering, Electrical & Electronic

Field-Plate-Terminated 4H-SiC Schottky Diodes Using Al-Based High-k Dielectrics

Amit S. Kumta et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2009)

Article Engineering, Electrical & Electronic

An assessment of wide bandgap semiconductors for power devices

JL Hudgins et al.

IEEE TRANSACTIONS ON POWER ELECTRONICS (2003)

Article Engineering, Electrical & Electronic

SiC and GaN transistors - Is there one winner for microwave power applications?

RJ Trew

PROCEEDINGS OF THE IEEE (2002)

Article Energy & Fuels

Floating zone growth of β-Ga2O3:: A new window material for optoelectronic device applications

Y Tomm et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2001)