4.6 Article

High-Temperature Coefficient of Resistance in MoxW1-xS2 Thin Film

期刊

APPLIED SCIENCES-BASEL
卷 12, 期 10, 页码 -

出版社

MDPI
DOI: 10.3390/app12105110

关键词

2D; sulfurization; temperature coefficient of resistance; thermal sensor

资金

  1. Ministry of Science and Technology of Taiwan [MOST 110-2221-E-017-009, MOST 109-2221-E-018-012]

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This study investigates the synthesis and properties of MoxW1-xS2 ternary compound. The results show that MoxW1-xS2 samples have unique Raman spectra and sheet-like surface morphology, making them suitable for thermal sensors.
Despite the use of transition metal dichalcogenides being widespread in various applications, the knowledge and applications of MoxW1-xS2 compounds are relatively limited. In this study, we deposited a MoW alloy on a Si substrate using a sputter system. Consequently, we successfully utilized a furnace to sulfurize the MoW alloy from 800 to 950 degrees C, which transferred the alloy into a MoxW1-xS2 ternary compound. The Raman spectra of the MoxW1-xS2 samples indicated an additional hybridized Raman peak at 375 cm(-1) not present in typical MoS2 and WS2. With increasing sulfurization temperature, the scanning electron microscopy images revealed the surface morphology of the MoxW1-xS2 gradually becoming a sheet-like structure. The X-ray diffraction results showed that the crystal structure of the MoxW1-xS2 tended toward a preferable (002) crystal orientation. The I-V results showed that the resistance of MoxW1-xS2 increased when the samples were sulfurized at a higher temperature due to the more porous structures generated within the thin film. Furthermore, a high-temperature coefficient of resistance for the MoxW1-xS2 thin film sulfurized at 950 degrees C was about -1.633%/K-1. This coefficient of resistance in a MoxW1-xS2 thin film indicates its suitability for use in thermal sensors.

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