相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Toward Single-Atomic-Layer Lithography on Highly Oriented Pyrolytic Graphite Surfaces Using AFM-Based Electrochemical Etching
Wei Han et al.
Nanomanufacturing and Metrology (2022)
Atomic-Level Material Removal Mechanisms of Si(110) Chemical Mechanical Polishing: Insights from ReaxFF Reactive Molecular Dynamics Simulations
Ming Wang et al.
LANGMUIR (2021)
Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon
Changlin Liu et al.
NANOSCALE RESEARCH LETTERS (2021)
Mechanism of atomic and close-to-atomic scale cutting of monocrystalline copper
Wenkun Xie et al.
APPLIED SURFACE SCIENCE (2020)
Effect of tool edge radius on material removal mechanism in atomic and close-to-atomic scale cutting
Wenkun Xie et al.
APPLIED SURFACE SCIENCE (2020)
Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
Fengyuan Zhang et al.
JOURNAL OF APPLIED PHYSICS (2020)
On the mechanism of dislocation-dominated chip formation in cutting-based single atomic layer removal of monocrystalline copper
Wenkun Xie et al.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY (2020)
Cutting-based single atomic layer removal mechanism of monocrystalline copper: edge radius effect
Wenkun Xie et al.
NANOSCALE RESEARCH LETTERS (2019)
Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon
Mehdi Heidari et al.
JOURNAL OF MANUFACTURING PROCESSES (2019)
Ion-Beam Sculpting of Nanowires
Morteza Aramesh
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2018)
Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions
Lei Chen et al.
NATURE COMMUNICATIONS (2018)
Variation of surface generation mechanisms in ultra-precision machining due to relative tool sharpness (RTS) and material properties
M. Azizur Rahman et al.
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE (2017)
The possibility of multi-layer nanofabrication via atomic force microscope-based pulse electrochemical nanopatterning
Uk Su Kim et al.
NANOTECHNOLOGY (2017)
Localized etching of silicon in water using a catalytically active platinum-coated atomic force microscopy probe
Kota Yamamoto et al.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2017)
Molecular dynamics simulation of the material removal process and gap phenomenon of nano EDM in deionized water
Xiaoming Yue et al.
RSC ADVANCES (2015)
Pulse force nanolithography on hard surfaces using atomic force microscopy with a sharp single-crystal diamond tip
Alexei Temiryazev
DIAMOND AND RELATED MATERIALS (2014)
Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography
Arash Dehzangi et al.
PLOS ONE (2013)
Electron beam-assisted healing of nanopores in magnesium alloys
He Zheng et al.
SCIENTIFIC REPORTS (2013)
Large area nanoscale patterning of silicon surfaces by parallel local oxidation
N. S. Losilla et al.
NANOTECHNOLOGY (2009)
Precision and accuracy of thermal calibration of atomic force microscopy cantilevers
G. A. Matei et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2006)
The influence of rake angle, cutting feed and cutting depth on residual stresses in hard turning
P Dahlman et al.
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2004)
Nanopatterning of Si/SiGe electrical devices by atomic force microscopy oxidation
XZ Bo et al.
APPLIED PHYSICS LETTERS (2002)
Fabrication of silicon utilizing mechanochemical local oxidation by diamond tip sliding
S Miyake et al.
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS (2001)
Nano-oxidation of silicon surfaces:: Comparison of noncontact and contact atomic-force microscopy methods
M Tello et al.
APPLIED PHYSICS LETTERS (2001)
分享论文
