期刊
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
卷 12, 期 3, 页码 454-461出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TCPMT.2021.3107225
关键词
Microphones; Micromechanical devices; Electrostatics; Acoustics; Electrostatic measurements; Stress; Voltage measurement; Acoustic micro-electro-mechanical systems (MEMSs); built-in self-repair (BISR); built-in self-test (BIST); capacitive microphone; failure induction; microphone
类别
资金
- Engineering and Physical Sciences Research Council (EPSRC)-Center for Doctoral Training in Embedded Intelligence (CDT-EI) [1799140]
This article presents a framework for detecting failures in mobile phone microphones, using frequency response analysis and acoustic measurements with new techniques. It demonstrates a high success rate for non-invasive fault detection.
Most mobile phones today have capacitive micro-electro-mechanical systems (MEMSs) microphones that use either single or dual diaphragms. Methods to detect failures easily and non-invasively have become of critical importance for microphones mobile phone manufacturers as a basis for built-in self-test (BIST) and self-repair (BISR) strategies. In that regard, a four-layer framework is presented that includes lumped element modeling (LEM), failure mode simulation, failure mode discrimination, and recovery. The frequency response of the microphone is taken as the main output to analyze. To experimentally validate this framework, this article provides a failure mode induction method based on bias voltage sweeping and four new techniques, based solely on acoustic measurements to discriminate the states of electrostatic capture for single diaphragm capacitive MEMS microphones. These include 1) analysis of an acoustic signature that is unique to electrostatic capture based on cosine similarity analysis; 2) -3 dB point measurement; 3) +3 dB point measurement; and 4) cluster analysis. Measurement of pull-in voltage and snapback voltage ranges is further demonstrated based on sensitivity measurements in laboratory conditions and response magnitude and noise power measurements in non-laboratory conditions. Up to 100% success rate in detecting electrostatic capture of diaphragm is reported for this type of device.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据