4.7 Article

Uniform deposition of silicon oxide film on cylindrical substrate by radially arranged plasma jet array

期刊

SURFACE & COATINGS TECHNOLOGY
卷 437, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2022.128365

关键词

SiOx film; Cylindrical substrate; Radially arranged plasma jet array; Uniformity

资金

  1. National Natural Science Foundation of China [51877205, 52011530191]
  2. Fundamental Research Funds for the Central Universities [buctrc201906]

向作者/读者索取更多资源

In this study, SiOx films were deposited on a cylindrical substrate using a radially arranged plasma jet array. The properties of the deposited films, including surface morphology, film thickness, elemental composition, and chemical structure, were systematically studied. The effect of surface modification on insulation improvement in a gas insulated transmission line system was also investigated. The results showed that the plasma jet array deposition method could produce SiOx films with good uniformity and improved insulation performance.
In this work, the SiOx film was deposited on a cylindrical substrate by a radially arranged plasma jet array generated by an AC power supply. The properties of deposited SiOx film were studied systematically, including surface morphology, film thickness, elemental composition and chemical structure. Besides, the effect of surface modification on insulation improvement in a gas insulated transmission line (GIL) system was verified. The discharge uniformity of the plasma jet array was improved by adding ballast resistor in the series circuit. Our results showed that the SiOx films were composed with Si-O-Si group dominated by network structure along with a small amount of Si-OH group and inorganic groups (-CH2, Si-CH3). The film deposited by plasma jet array showed good uniformity on thickness and element composition. The lift-off voltage of metal particle improved by about 120.88% after SiOx film deposition. Our results provide a universal surface modification method for cylindrical substrate under mild conditions.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据