期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 361, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2022.131691
关键词
Quartz crystal microbalance; Humidity sensor; Tungsten oxide; Antimony doping; Density functional theory
资金
- National Key Research and Develop-ment Program of China [2021YFC2302200]
- Natural Science Fund of Guangdong Province for Distinguished Young Scholars [22050000282]
- National Natural Science Foundation of China [81972019, 21904145, 82102360, 81772136, 82172205]
- Spe-cial Fund of Foshan Summit Plan [2020B019, 2020B012, 2020A015, 2019A006, 2019C002, 2019D008]
- (Foshan City, China) , Zhongnanshan Medical Foundation of Guangdong Province [ZNSA-2021012]
- (Guang-dong Province, China) , Training project of National Science Foundation [C620PF0217]
- (Southern Medical University, China) , China Postdoctoral Science Foundation [2021M690634]
- Guangdong Basic and Applied Basic Research Foundation [2020A1515110529]
- Foundation of Foshan City [FS0AA-KJ218-1301-0034, 2018AB003411]
- (Foshan City, China)
- ACS Authoring Services
Humidity sensing is a promising method for monitoring respiration and diagnosing diseases. In this study, a humidity sensor using Sb-doped WO3 nanocrystals was successfully fabricated. The sensor exhibited fast response and recovery times, high sensitivity, and good stability and self-recovery ability under wet conditions. It was also applied to monitor moisture changes of a wound, which was previously unexplored using this type of sensor.
Humidity sensing is a promising method for monitoring respiration and diagnosing diseases. However, the fabrication of a semiconductor-based humidity sensor with fast response/recovery times and high sensitivity even under wet conditions remains challenging. In this study, a quartz crystal microbalance (QCM) humidity sensor was fabricated using Sb-doped WO3 nanocrystals via a simple solvothermal method. Sb doping increased the number of oxygen vacancies and led to a narrow band gap. It also restricted the further growth of WO3 and provided more adsorption sites, which resulted in a small particle size and large specific surface area. The device displayed a wide range of relative humidity (0-85%) with fast response and recovery times (10 and 1.6 s, respectively) and good long-term stability. After 100 cycles of wet treatment, the response of the sensor recovered to 92.2%, showing good self-recovery ability. The Sb/WO3-based QCM sensors were applied to the sensitive monitoring not only of respiratory humidity but also of moisture changes of a wound; the latter had never previously been performed using a QCM. This study therefore provides valuable insights for the development of integrated wound-microenvironment monitoring.
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