Detection of Volatile Organic Compounds by Using MEMS Sensors

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers-polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)-to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.

Automated summary

This study reports on the deployment of MEMS static bifurcation sensors for the detection of volatile organic compounds, specifically hydrogen sulfide and formaldehyde. The sensitivity and selectivity of two detector polymers, polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA), were investigated. A semi-automatic method was developed to functionalize individual sensors and arrays with the detector polymers. The results show that the sensor array can selectively detect 1 ppm of formaldehyde in the presence of benzene.